Transistor Substrate With Multi-Thickness Color Filter Contact Holes
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Solution Overview
Problem
In the manufacturing of thin film transistor substrates for liquid crystal display devices, existing methods face challenges in optimizing the precision and efficiency of contact hole formation and aperture ratio due to complexities in configuring color filters and their dimensions.
Innovation Solution
The approach involves forming a set of color filters with different colors that overlap the transistor, defining a hole to expose a portion of the transistor, and positioning a pixel electrode inside this hole to directly contact the color filters, allowing for precise control over contact hole locations and dimensions through the use of multiple masks and varying thicknesses of color filters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If color filters are configured with complex dimensions and arrangements to define contact holes, then contact hole precision is improved, but device complexity increases
Solution Approach 1:
The color filter layer is divided into multiple separate color filters (first color filter, second color filter, third color filter) with different thicknesses. Each color filter is positioned at specific locations relative to the transistor to define contact holes. This segmentation allows precise control of contact hole dimensions and positions by independently configuring each color filter's thickness and position, rather than using a single complex filter structure.
Solution Approach 2:
Different regions of the color filter layer have different thicknesses to serve different functions. The first color filter has a first thickness, the second color filter has a second thickness, and the third color filter has a third thickness. This local variation in thickness allows specific contact holes to be defined at specific locations with precise dimensions, improving manufacturing precision while maintaining manageable overall device complexity.
2Manufacturing precision
If color filters are made with varying thicknesses to control contact hole dimensions, then manufacturing precision is improved, but ease of manufacture decreases
Solution Approach 1:
The color filter layer is segmented into multiple color filters that can be fabricated separately with different thicknesses using standard thin film deposition techniques. Each color filter (first, second, and third) is formed independently, allowing precise thickness control through conventional manufacturing processes rather than requiring complex single-step fabrication.
Solution Approach 2:
The invention controls contact hole dimensions by varying the thickness dimension of color filters rather than relying solely on planar geometry. By adjusting the thickness of each color filter (first thickness, second thickness, third thickness), precise control over contact hole depth and position is achieved, adding a dimensional degree of freedom to the manufacturing process.
3Manufacturing precision
If contact holes are positioned to expose transistor portions for pixel electrode contact, then aperture ratio is improved, but manufacturing complexity increases
Solution Approach 1:
The color filters are pre-positioned and pre-formed with specific thicknesses before the pixel electrode is deposited. This preliminary configuration of the color filter layer with multiple filters of different thicknesses automatically defines the contact hole locations and dimensions, so that when the pixel electrode is subsequently formed, it naturally makes contact with the transistor portions through the pre-defined holes without requiring additional alignment steps.
Solution Approach 2:
The multi-thickness color filter structure serves dual functions: it provides color filtering for the display and simultaneously defines the contact holes for electrical connection. The varying thicknesses of the first, second, and third color filters automatically create the necessary openings and guide the pixel electrode formation, eliminating the need for separate contact hole definition processes.
Data Source
AI summary
A transistor substrate may include a transistor. The transistor substrate may further include a set of color filters that has at least two different colors, overlaps the transistor, and defines a hole. The hole exposes a portion of the transistor.