Transmissive Optical Image Modulator Using Transparent Substrate
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Solution Overview
Problem
Existing optical image measurement methods, such as stereo vision and time-of-flight techniques, face challenges in achieving high precision and resolution, especially at larger distances, and current transmissive optical modulators are bulky, expensive, and prone to mechanical instability.
Innovation Solution
A transmissive type optical image modulator design featuring a base substrate with etch stop layers, separated expitaxial layers, and a transparent substrate, along with a specific electrode configuration and manufacturing process, to enhance mechanical tolerance and electrical-optical response uniformity across a large area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a conventional opaque substrate is used in transmissive optical modulators, then structural support is provided, but light transmission is blocked
Solution Approach 1:
The patent removes the opaque substrate from the optical modulator structure, extracting only the necessary functional layers (expitaxial layers with electrodes) while eliminating the light-blocking opaque substrate. This allows light to pass through the modulator while maintaining structural integrity through the transparent substrate and expitaxial layer configuration.
2Illumination intensity
If the GaAs substrate is removed for light transmission, then light transmission is enabled, but mechanical stability deteriorates
Solution Approach 1:
The patent introduces a transparent substrate as an intermediary component that provides mechanical support and stability while allowing light transmission. The expitaxial layers are transferred to this transparent substrate, which acts as a mediator between the need for light transmission and the need for mechanical stability.
Solution Approach 2:
The patent uses thin expitaxial layers (including active layers and DBR layers) that maintain structural integrity while being flexible enough to be transferred to a transparent substrate. These thin film structures provide the necessary mechanical properties for large-area modulators while enabling light transmission.
3Illumination intensity
If expitaxial thin film is used as support, then light transmission is improved, but vulnerability to external impact increases
Solution Approach 1:
The patent creates a composite structure consisting of multiple expitaxial layers (lower DBR layer, active layer, upper DBR layer, contact layer) stacked on a transparent substrate. This composite structure combines the optical properties of the expitaxial layers with the mechanical strength of the transparent substrate, providing both light transmission and impact resistance.
Solution Approach 2:
The patent adds a vertical dimension to the structure by stacking multiple functional layers in sequence on the transparent substrate. This multi-layer configuration distributes mechanical stress across different layers and interfaces, enhancing overall structural strength while maintaining optical performance.
4Area of stationary object
If large-area modulator is manufactured, then coverage area is increased, but uniformity of electrical-optical response decreases
Solution Approach 1:
The patent divides the large-area modulator into multiple unit optical modulators arranged in an array. Each unit modulator contains its own expitaxial layers and electrodes, and they are separated by trenches. This segmentation allows each unit to maintain uniform electrical-optical response while collectively providing large-area coverage.
Solution Approach 2:
The patent ensures that each unit optical modulator has optimized local properties (expitaxial layer thickness, electrode positioning, trench dimensions) that guarantee uniform performance. By controlling the quality of each local unit rather than treating the entire large area as homogeneous, consistent electrical-optical response is achieved across the whole modulator array.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high-speed and uniform electrical-optical response with improved mechanical tolerance, allowing for precise and stable optical image modulation, even in large-area applications.
Implementation Method 1
a lower distributed Bragg reflector (DBR) layer, an active layer, an upper DBR layer
Implementation Method 2
transmissive optical image shutter using GaAs-based electro-absorption
Implementation Method 3
an intrinsic layer between PN electrodes includes a multiple quantum well and forms excitons in a specific wavelength area to facilitate electro-absorption
Implementation Method 4
an intrinsic layer between PN electrodes includes a multiple quantum well
Data Source
AI summary
A large-area transmissive type optical image modulator, a method of manufacturing the same, and an optical apparatus including the transmissive type optical image modulator are provided. The large-area transmissive type optical image modulator includes: a base substrate; a first expitaxial layer formed on the base substrate; a second expitaxial layer formed on the first expitaxial layer; a first electrode formed on the first expitaxial layer and spaced apart from the second expitaxial layer; a second electrode formed on the second expitaxial layer; and a transparent substrate covering the second expitaxial layer and the second electrode, wherein the base substrate includes a through hole corresponding to a light emitting area, and the first expitaxial layer may include an n-type or p-type doping material.