Transparent Conductive Microscope Slide for Charged Particle Instruments
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Solution Overview
Problem
Conventional sample carriers used in charged particle instruments, such as SEMs and FIBs, are not compatible with optical microscopy using transmission of light and suffer from sample charging issues, which limits their application and image quality.
Innovation Solution
A transparent conductive metal oxide-coated optical microscope slide is used as a sample carrier, where the conductive layer is connected to a fixed potential to prevent charging, allowing for simultaneous use in both optical microscopes and charged particle instruments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional glass microscope slide is used as a sample carrier, then it is compatible with optical microscopy using transmission of light, but it causes sample charging in charged particle instruments due to its insulating properties
Solution Approach 1:
The invention uses a composite structure consisting of a glass microscope slide substrate combined with a transparent conductive metal oxide coating layer. This composite material simultaneously provides the optical transparency needed for light microscopy and the electrical conductivity needed to prevent charging in charged particle instruments, thereby resolving the contradiction between optical compatibility and charging prevention.
2Object-affected harmful factors
If a metal stub is used as a sample carrier in charged particle instruments, then sample charging is prevented by connecting to ground potential, but it is not compatible with transmission light microscopy due to opacity
Solution Approach 1:
The invention applies a transparent conductive metal oxide coating that is visually transparent to light, allowing transmission microscopy to function. This transparent coating provides the necessary electrical conductivity to prevent charging, unlike traditional opaque metal stubs. The 'color change' principle refers to the material's optical property of being transparent rather than opaque, enabling dual-use functionality.
3Object-affected harmful factors
If a conductive coating is applied to a microscope slide to prevent charging, then sample charging is reduced, but the transparency and optical quality may be degraded
Solution Approach 1:
The invention carefully controls the parameters of the metal oxide coating, specifically its thickness and composition, to achieve optimal balance between electrical conductivity and optical transparency. By adjusting these parameters, the coating provides sufficient conductivity to prevent charging while maintaining high light transmission quality for optical microscopy, thus resolving the contradiction between charging prevention and optical performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents sample charging and enables the use of the sample carrier in both optical microscopy and charged particle instruments, maintaining image quality and compatibility with transmission light microscopy.
Implementation Method 1
a transparent conductive layer of a metal oxide as sample carrier in a scanning charged particle apparatus
Implementation Method 2
The microscope slide is transparent to light and can be used as a normal microscope slides
Data Source
AI summary
An optical microscope slide in a charged particle instrument such as an electron microscope or a focused ion beam instrument. Conventional microscope slides are not fit for use in an electron microscope as they are insulating and would thus charge when viewed in an electron microscope due to the impinging beam of charged particles. However, microscope slides exist that show a coating with a conductive layer of e.g. Indium Tin Oxide (ITO). These microscope slides are normally used for heating the object mounted on the slide by passing a current through the conductive layer. Experiments show that these microscope slides can be used advantageously in a charged particle instrument by connecting the conductive layer to e.g. ground potential, thereby forming a return path for the impinging charged particles and thus avoiding charging. The invention further relates to a charged particle instrument that is further equipped with an optical microscope.