Transparent Electrode with Auxiliary Metal Pattern for Conductivity
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Solution Overview
Problem
Existing transparent electrodes in electronic devices, such as displays and touch panels, face challenges with low conductivity, necessitating the development of an electrode structure that enhances conductivity while being easily manufacturable.
Innovation Solution
The electrode comprises an auxiliary electrode with a conductive pattern and a main electrode, where the taper angle of the auxiliary electrode is controlled to ensure stability and interlayer interface characteristics, allowing for improved conductivity and manufacturing ease through methods like photolithography and indirect printing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a transparent conductive film (ITO, ZnO, etc.) is used as an electrode, then transparency is achieved, but conductivity is low
Solution Approach 1:
The patent combines a transparent conductive film electrode with a metal auxiliary electrode to create a composite electrode structure. The transparent conductive film maintains transparency while the metal auxiliary electrode provides enhanced conductivity, resolving the contradiction between transparency and conductivity by merging two different materials with complementary properties.
Solution Approach 2:
The electrode structure uses composite materials by combining a transparent conductive film (such as ITO or ZnO) with a metal pattern (auxiliary electrode). This composite structure allows the electrode to simultaneously achieve the transparency required for display applications and the conductivity needed for effective electrical connection.
2Reliability
If a metal auxiliary electrode is formed on a transparent conductive film, then conductivity is enhanced, but manufacturing complexity increases
Solution Approach 1:
The electrode is segmented into two functional parts: a transparent conductive film layer and a metal auxiliary electrode layer. This segmentation allows each layer to perform its specific function optimally while being manufactured through separate, well-established processes (sputtering for the TCF and photolithography for the metal pattern), thereby managing manufacturing complexity.
Solution Approach 2:
The transparent conductive film is formed first as a preliminary layer before the metal auxiliary electrode is deposited. This preliminary action establishes a stable base layer that facilitates subsequent metal patterning processes, making the overall manufacturing sequence more manageable and reducing complexity.
3Ease of manufacture
If the taper angle of the auxiliary electrode is not controlled, then manufacturing is simpler, but thickness deviation and interface stability deteriorate
Solution Approach 1:
The patent specifies controlling the taper angle of the auxiliary electrode within a particular range (0° to 45°) to optimize both manufacturing feasibility and interface quality. This parameter control ensures that the metal auxiliary electrode maintains good adhesion and electrical contact with the transparent conductive film while allowing for practical manufacturing using standard photolithography and sputtering processes.
Solution Approach 2:
The patent employs sputtering deposition to form the metal auxiliary electrode with controlled taper angle. The sputtering process uses plasma (a state of matter involving ionized gas) to deposit metal atoms onto the substrate, allowing precise control over film thickness and taper angle, thereby achieving both manufacturing simplicity and precision.
Data Source
AI summary
The present invention relates to an electrode comprising an auxiliary electrode comprising a conductive pattern and a main electrode provided on at least a portion of the auxiliary electrode to be electrically connected to the auxiliary electrode, and a manufacturing method thereof.