Transparent Electrode Pattern for Flexible Touch Sensors
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Solution Overview
Problem
Flexible touch sensors for deformable electronic devices face challenges in maintaining transparency and conductivity while being flexible, as existing electrode patterns often fail to transmit light effectively and maintain high conductivity after deformation.
Innovation Solution
A transparent electrode pattern comprising a first and second electrode with metal nanowires and a transparent conductive material like gallium tin oxide (GTO), where the upper conductive layers are dry-etchable and include a plasma gas composition of chlorine or bromine, and an overcoat is used to enhance adherence and flexibility, with a manufacturing method involving dry-etching and plasma treatment to form a separated structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a metal nanowire is used as the lower conductive layer to provide flexibility, then the electrode pattern can be deformed without failure, but the transparency and conductivity are insufficient compared to traditional rigid materials
Solution Approach 1:
The patent uses a composite structure combining metal nanowires (AgNW) in the lower conductive layer with transparent conductive materials (TCO) such as ITO, IZO, or GTO in the upper conductive layer. This composite approach allows the metal nanowire network to provide flexibility and stretchability while the TCO layer maintains high transparency and conductivity, resolving the contradiction between flexible deformation capability and reliable electrical performance.
2Illumination intensity
If the electrode pattern is made transparent to allow light transmission, then the display quality is improved, but the conductivity and flexibility are compromised
Solution Approach 1:
The upper conductive layer uses transparent conductive materials (TCO) such as ITO, IZO, or GTO that inherently provide both high transparency and good conductivity. The lower conductive layer uses metal nanowires that contribute to both flexibility and conductivity. This composite material strategy enables the electrode pattern to simultaneously achieve high transparency for display quality and reliable conductivity for touch sensing performance.
3Adaptability or versatility
If the electrode pattern is made flexible to accommodate deformable devices, then the device adaptability is improved, but the manufacturing precision and pattern uniformity deteriorate
Solution Approach 1:
The electrode pattern is segmented into two distinct conductive layers: a lower layer using metal nanowires for flexibility and an upper layer using TCO for precision and uniformity. The lower conductive layer can be formed using solution-based processes that accommodate flexible substrates, while the upper conductive layer can be deposited using sputtering or other precise deposition techniques. This segmentation allows each layer to be optimized for its specific function without compromising the other.
Solution Approach 2:
The composite structure of metal nanowire lower layer and TCO upper layer enables the system to achieve both flexibility and manufacturing precision. The metal nanowire network provides the flexible foundation that can conform to deformable substrates, while the TCO layer deposited on top maintains uniform thickness and composition through controlled deposition processes, ensuring pattern uniformity even on flexible substrates.
4Device complexity
If a single-layer electrode structure is used to simplify manufacturing, then the device complexity is reduced, but the ability to maintain both transparency and flexibility is compromised
Solution Approach 1:
The patent employs a two-layer composite conductive structure where the lower layer uses metal nanowires for flexibility and the upper layer uses TCO for transparency and conductivity. This composite approach, while adding structural complexity, enables the simultaneous achievement of multiple performance requirements that cannot be met by a single material system. The synergistic combination of materials in the composite structure allows the electrode pattern to maintain high transparency, good conductivity, and excellent flexibility together.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high transmittance and reduced sheet resistance, maintaining conductivity and flexibility, while minimizing optical haze and allowing for fine pitch patterns, thus addressing the need for transparent and durable electrode patterns in flexible electronic devices.
Implementation Method 1
A plasma gas composition including chlorine (Cl) or bromine (Br) is present on a surface of the first and second upper conductive layers
Implementation Method 2
The first and second upper conductive layers may include a transparent conductive material that is dry-etchable
Data Source
AI summary
A transparent electrode pattern includes a first electrode including a first lower conductive layer and a first upper conductive layer located on the first lower conductive layer and a second electrode spaced apart from the first electrode and including a second lower conductive layer and a second upper conductive layer positioned on the second lower conductive layer. The first and second lower conductive layers may include a metal nanowire. The first and second upper conductive layers may include a transparent conductive material that is dry-etchable.