Transparent Conductive Electrode Dielectric for Water Stability

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Solution Overview

Problem

Molybdenum oxide thin films used in optoelectronic devices are unstable in the presence of water, leading to degradation and dissolution, which compromises their functionality and hampers processing with water-based substances.

Innovation Solution

The use of molybdenum-titanium-oxide, molybdenum-tantalum-oxide, or molybdenum-titanium-tantalum-oxide compounds as dielectric layers in transparent conductive electrodes, which provide enhanced chemical stability and retain favorable electronic and optical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If molybdenum oxide thin films are used in transparent conductive electrodes, then favorable chemical, electronic and optical properties are achieved, but chemical stability in water deteriorates

Engineering Contradiction:
Improvechemical stabilityVSAvoidstability in water
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent applies composite materials by combining molybdenum oxide with titanium oxide or tantalum oxide to form composite dielectric layers. This composite structure integrates the favorable electronic and optical properties of molybdenum oxide with the high chemical stability of titanium oxide or tantalum oxide, thereby resolving the contradiction between maintaining good electrical performance and achieving water stability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the chemical composition parameters of the dielectric layer by introducing titanium or tantalum elements into the molybdenum oxide structure. This parameter change modifies the chemical stability characteristics while preserving the electrical properties, allowing the material to withstand water exposure without degradation.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If molybdenum oxide thin films are used, then low sheet resistance and transparency are achieved, but processing with water-based substances becomes problematic

Engineering Contradiction:
ImproveprocessabilityVSAvoiddegradation by water
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent uses titanium oxide or tantalum oxide as an intermediary protective layer within the dielectric structure. This intermediary material acts as a barrier that protects the molybdenum oxide from water-based substances, enabling the use of water-based processing solutions like PEDOT:PSS without causing degradation to the underlying molybdenum oxide layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Duration of action of stationary object

If pure molybdenum oxide is used, then favorable electronic properties are maintained, but longevity in optoelectronic devices deteriorates

Engineering Contradiction:
Improvedevice longevityVSAvoidchemical stability
Core Design Contradiction:
Duration of action of stationary objectVSReliability

Solution Approach 1:

The patent employs composite materials consisting of molybdenum oxide combined with titanium oxide or tantalum oxide. This composite approach ensures long-term device longevity by providing both the favorable electronic properties needed for device functionality and the chemical stability required to resist degradation over time in various operating conditions.

Inventive Principle:
Principle #40Composite materials

Data Source

PatentEP3770983B1Transparent conductive electrode and method for manufacturing the same
Publication Date: 2026.04.15 AIT AUSTRIAN INSTITUTE OF TECNOLOGY GMBH
  • EP3770983B1 patent drawingFigure 1~2
  • EP3770983B1 patent drawingFigure 3A~3B
  • EP3770983B1 patent drawingFigure 4~7B

AI summary

The present invention relates to a transparent conductive electrode (1, 10) comprising a metal layer (5), an optional first (3) and a second dielectric layer (4) wherein the second dielectric layer (4) and/ or the optional first (3) dielectric layer comprise/s molybdenum oxide containing titanium oxide and/or tantalum oxide.