Transparent Lid Structure for Laser-Adjusted Vibrator Devices
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vibrator devices face challenges in characterizing and adjusting the accommodated vibrating elements due to low light transmittance in silicon lids and increased form variation in glass lids during wet etching, which hinders precise manufacturing and adjustment processes.
Innovation Solution
A vibrator device is designed with a base and a lid where the lid features a glass substrate with light-transmitting properties and a frame-form silicon substrate, allowing for accurate frame formation and easy adjustment using laser beams, while maintaining a small form variation and high dimensional accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a silicon lid is used, then the structural integrity and sealing are improved, but the light transmittance decreases making laser adjustment impossible
Solution Approach 1:
The lid is divided into two distinct parts: a silicon frame portion providing structural support and sealing, and a transparent substrate portion allowing light transmission. This segmentation enables each part to fulfill its specific function without compromise - the silicon frame maintains integrity while the transparent substrate enables laser beam passage for electrode adjustment.
2Illumination intensity
If a glass lid is used with wet etching, then the light transmittance is improved, but the form variation increases reducing manufacturing precision
Solution Approach 1:
The silicon frame acts as an intermediary structure that supports the transparent substrate while providing precise dimensional control. The silicon frame's rigid structure compensates for the glass substrate's tendency toward form variation during wet etching, maintaining overall manufacturing precision while preserving light transmission properties.
3Reliability
If a solid silicon lid is used, then the sealing performance is improved, but the accessibility for laser adjustment is reduced
Solution Approach 1:
The lid is segmented into a silicon frame portion that provides sealing and a transparent substrate portion that enables laser access. This segmentation allows the sealing function and adjustment accessibility to be fulfilled by different parts of the lid structure simultaneously, resolving the contradiction between reliable sealing and ease of operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise adjustment and characterization of the vibrating elements, enhancing the manufacturing process and device performance by allowing for accurate laser-based adjustments through the light-transmitting lid.
Implementation Method 1
a substrate having a light transmitting property
Implementation Method 2
removing a part of the electrode by irradiating the electrode with a laser beam transmitted through the lid
Data Source
AI summary
A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.