Transparent Urethane Resin Support for Wafer Division Monitoring
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Solution Overview
Problem
Resin support members used in wafer division processes tend to discolor over time, reducing their transparency and making it difficult to monitor the division process effectively due to decreased light transmittance, which can lead to improper division or damage to the workpiece.
Innovation Solution
A resin member formed with urethane linkages derived from a reaction between a polyether polyol and an aliphatic isocyanate, specifically hexamethylene diisocyanate, which maintains high transmittance (>74.8% at 550 nm) and Shore A hardness of 50 to 90, reducing the likelihood of discoloration and allowing for effective deformation and pressure mitigation during wafer division.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a resin member is used as a support member for wafer division, then the workpiece can be deformed and divided more easily with reduced pressure, but the resin member is liable to be gradually discolored over time
Solution Approach 1:
The patent changes the chemical composition parameters of the resin member by specifying it must contain urethane linkages from polyether polyol and aliphatic isocyanate reactions. This parameter change ensures the resin maintains both flexibility for easy wafer division and resistance to discoloration, preserving transparency over time.
Solution Approach 2:
The patent creates a composite resin structure through the reaction between polyether polyol and aliphatic isocyanate, forming urethane linkages. This composite material combines the flexibility needed for easy wafer division with the stability required to resist discoloration and maintain transparency.
2Strength
If a hard support member is used, then the support structure is stable, but deformation of the workpiece is hampered and excessive pressure may damage the workpiece
Solution Approach 1:
The patent adjusts the hardness parameter of the support member by specifying Shore A hardness between 40 and 90. This parameter optimization allows the member to provide sufficient support strength while remaining soft enough to enable workpiece deformation and division without excessive pressure.
Solution Approach 2:
The patent employs a flexible resin member with Shore A hardness of 40-90, which acts as a compliant support structure. This flexibility allows the member to deform along with the workpiece during division, providing support while facilitating easy separation without damaging the workpiece.
3Measurement precision
If the resin member transmittance is high for imaging, then the workpiece can be monitored clearly, but the resin member is more susceptible to discoloration over time
Solution Approach 1:
The patent optimizes the chemical composition parameters of the resin by specifying urethane linkages from polyether polyol and aliphatic isocyanate. This composition ensures high light transmittance for clear imaging while simultaneously providing resistance to discoloration, extending the service life of the resin member.
Solution Approach 2:
The patent avoids the need for frequent replacement of the resin member by selecting a composition that resists discoloration. The urethane-based resin maintains its imaging properties over extended periods, eliminating the need for short service life replacements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resin member maintains high transmittance and resistance to discoloration, enabling clear imaging and safe division of workpieces over extended periods, reducing the need for frequent replacements and ensuring accurate monitoring of the division process.
Implementation Method 1
the resin member has urethane linkages deriving from a reaction between a polyether polyol and an aliphatic isocyanate
Implementation Method 2
the lower surface side of the workpiece is imaged and observed through the support member
Data Source
AI summary
A resin member for supporting a workpiece has urethane linkages deriving from a reaction between a polyether polyol and an aliphatic isocyanate. Note that, preferably, the resin member has transmittance of not less than 74.88 for light of a wavelength of 550 nm. In addition, preferably, the resin member has Shore A hardness of 50 to 90.