Transparent Screen for Laser Optics Debris Protection

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Solution Overview

Problem

Laser ablation in a vacuum chamber for charged particle beam systems faces challenges with debris buildup on laser optics, leading to gradual degradation of the laser beam intensity, as existing methods for debris mitigation are not practical within a vacuum environment.

Innovation Solution

A protective transparent screen is used to shield the laser optical components, which can be easily replaced or repositioned without breaking vacuum, and is coated with a transparent conductor to prevent charging effects, ensuring continuous operation of the charged particle beam system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a transparent insulating material is used to protect the laser objective lens from debris, then the lens is protected from coating and laser beam intensity is maintained, but charging effects occur that degrade charged particle beam performance

Engineering Contradiction:
Improvelaser beam intensity stabilityVSAvoidcharging effects on charged particle beam
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The protective screen is made conductive by coating with a transparent conductive material such as indium tin oxide (ITO) or fluorine-doped tin oxide (FTO). This localized change in electrical property allows the screen to dissipate charge while maintaining optical transparency, thus protecting the lens without causing charging effects that would degrade charged particle beam performance

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The protective screen combines transparent insulating material (such as glass or quartz) with a transparent conductive coating layer. This composite structure provides both the protective function of the insulating material and the charge-dissipating property of the conductive coating, eliminating charging effects while maintaining lens protection and optical clarity

Inventive Principle:
Principle #40Composite materials

2Reliability

If gas is blown across the surface to keep debris away from the lens during atmospheric laser ablation, then debris is prevented from coating the lens, but this method is not practical in vacuum environment required for charged particle beam operation

Engineering Contradiction:
Improvelens protection from debris coatingVSAvoidcompatibility with vacuum environment
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

A transparent protective screen is introduced as an intermediary element between the laser objective lens and the ablation debris. This screen physically blocks debris from reaching the lens while being transparent to the laser beam, providing lens protection without requiring gas flow or breaking the vacuum environment

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The protective screen is designed as a replaceable component that can be easily removed and replaced without breaking vacuum. When the screen becomes coated with debris, it can be quickly swapped for a clean screen, maintaining system performance without requiring complex cleaning mechanisms or vacuum breaks

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Reliability

If replaceable glass cover slips are used to protect the lens, then debris is kept away from the lens, but venting the sample chamber to atmosphere is required to replace the covers

Engineering Contradiction:
Improvelens protection from debrisVSAvoidvacuum chamber venting time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The protective screen serves as a permanent intermediary element installed within the vacuum chamber that eliminates the need to vent to atmosphere for replacement. The screen can be designed with quick-release mechanisms allowing replacement from the vacuum side, maintaining continuous vacuum operation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The protective screen is designed with dynamic replacement capability through quick-release clips, latches, or magnetic attachment mechanisms that allow the screen to be removed and replaced from the vacuum chamber without breaking vacuum. This dynamic design enables maintenance operations while maintaining the vacuum environment

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents debris from coating the laser optics, maintaining the laser beam intensity and preventing performance degradation, while avoiding the charging issues associated with insulating materials.

Implementation Method 1

The protective screen is coated with a transparent conductor to prevent charging effects

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

laser ablation, in which energy supplied rapidly to a small volume causes atoms to be explosively expelled from the substrate

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 3

energy supplied rapidly to a small volume causes atoms to be explosively expelled

Methodology Applied
Scientific EffectEnergy absorption: Absorption (EM radiation)

Data Source

PatentEP2644308B1Apparatus for and method of protecting light optical components during laser ablation
Publication Date: 2016.06.29 FEI CO
  • EP2644308B1 patent drawingFigure 1
  • EP2644308B1 patent drawingFigure 2
  • EP2644308B1 patent drawingFigure 3A

AI summary

A method of and an apparatus (300) to perform laser ablation in the vicinity of a charged particle beam (308) while simultaneously protecting the light optical components (316) of the apparatus (300) utilized to perform the ablation from being coated with debris resulting from the ablation process. A protective transparent screen (400) is used to shield the laser optical components(316). A preferred screen 400) could be replaced or repositioned without breaking vacuum in the sample chamber (340) and would not be particularly susceptible to undesirable charging effects.