Dual-System Detection for Transparent Substrate Orientation
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Solution Overview
Problem
Existing exposure apparatuses face challenges in accurately detecting the orientation reference of transparent substrates, which is crucial for aligning patterns with the crystal lattice direction, due to difficulties in detecting edges or orientation references on these substrates.
Innovation Solution
A detection apparatus comprising a first detection system for edge detection and a second detection system that projects a pattern and detects reflected light to determine the surface position perpendicular to the substrate, allowing for precise orientation reference detection after focusing operations are performed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If a metal film is deposited on the transparent substrate or a chamfer is provided to enable edge detection, then the detectability of the orientation reference is improved, but the device complexity and manufacturing steps increase
Solution Approach 1:
The patent introduces a focus detection system as an intermediary component that projects a pattern onto the substrate surface and detects the reflected light to determine the surface position. This mediator enables the edge detection system to obtain accurate focus information without requiring additional substrate modifications like metal films or chamfers, thereby resolving the contradiction between detectability and device complexity
Solution Approach 2:
The patent replaces the mechanical/physical modification approach (depositing metal films or creating chamfers) with an optical detection approach. The focus detection system uses optical projection and light reflection to detect surface position, substituting the need for physical substrate modifications and thereby reducing device complexity while maintaining detectability
2Device complexity
If the edge detection system operates without accurate focus information, then the detection process is simplified, but the measurement precision of the orientation reference deteriorates
Solution Approach 1:
The patent implements preliminary focus detection before edge detection by using the focus detection system to determine the surface position in advance. This preliminary action provides accurate focus information to the edge detection system, ensuring high measurement precision without complicating the overall detection process
Solution Approach 2:
The patent divides the detection process into two separate systems: a focus detection system that determines surface position, and an edge detection system that detects the orientation reference. This segmentation allows each system to specialize in its function, maintaining simplicity while achieving high precision through coordinated operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-accuracy detection of orientation references on both opaque and transparent substrates, improving the alignment of patterns with the crystal orientation, thereby enhancing the yield and quality of manufactured devices.
Implementation Method 1
detecting an image formed by reflected light from the surface
Data Source
AI summary
A detection apparatus detects an orientation reference of an object to be detected which includes an edge including the orientation reference. The apparatus includes a first detection system configured to detect the edge such that the orientation reference is detected, and a second detection system configured to detect, by projecting a pattern to a surface of the object and detecting an image formed by reflected light from the surface, a position of the surface in a direction perpendicular to the surface. After a focusing operation of the first detection system is performed based on the position of the surface detected by the second detection system, the first detection system detects the orientation reference.