Transparent Substrate Multilayer Film Heat Shielding
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Solution Overview
Problem
The heat shielding property of existing transparent substrates with laminated films is insufficient due to high resistance in nitrogen-containing light-absorbing layers, particularly those with titanium nitride, chromium nitride, niobium nitride, molybdenum nitride, or hafnium nitride layers.
Innovation Solution
A transparent substrate with a laminated film structure comprising a first dielectric layer, a crystallinity-improving layer containing ZrNx, and a functional layer with metal nitrides like titanium nitride or chromium nitride, where the concentration of oxygen at the boundary is limited to 20 atom% and the functional layer has a high extinction coefficient, improving crystallinity and conductivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a nitrogen-containing light-absorbing layer containing titanium nitride, chromium nitride, niobium nitride, molybdenum nitride or hafnium nitride is formed on the transparent conductive layer, then the heat shielding property is improved, but the resistance becomes high which reduces conductivity
Solution Approach 1:
The light-absorbing layer is divided into two separate layers: a lower nitrogen-containing light-absorbing layer (titanium nitride, chromium nitride, niobium nitride, molybdenum nitride or hafnium nitride) that provides heat shielding, and an upper carbon-containing light-absorbing layer that provides conductivity. This segmentation allows each layer to optimize its specific function without compromising the other.
Solution Approach 2:
The invention uses a composite structure combining two different material systems: metal nitrides (TiN, CrN, NbN, MoN, HfN) for heat absorption and carbon-containing materials for conductivity. This composite approach leverages the complementary properties of different materials to achieve both high heat shielding and low resistance simultaneously.
2Loss of energy
If the nitrogen-containing light-absorbing layer is made thicker to improve heat shielding, then the heat shielding property increases, but the resistance increases which worsens conductivity
Solution Approach 1:
By segmenting the light-absorbing function into two layers with different thicknesses and compositions, the invention allows the nitrogen-containing layer to be optimized for heat shielding thickness while the carbon-containing layer compensates for resistance, achieving both goals simultaneously.
Solution Approach 2:
The invention changes the compositional parameters by introducing a carbon-containing layer with specific carbon content (0.1-5.0 atom%) and controls the thickness parameters of both layers to achieve the optimal balance between heat shielding and conductivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved crystallinity and conductivity of the functional layer enhance the heat shielding property of the transparent substrate, achieving a higher heat shielding performance.
Implementation Method 1
the crystallinity of the metal nitride contained in the functional layer is improved
Implementation Method 2
a functional layer having an extinction coefficient of higher than 2.8 at a wavelength of 1,500 nm
Implementation Method 3
which forms the first dielectric layer, the crystallinity-improving layer, the functional layer and the second dielectric layer by a sputtering method
Implementation Method 4
wherein after forming the layers by the sputtering method, heat treatment is carried out at from 400 to 700°C for from 2 to 60 minutes
Data Source
Figure 1~2
AI summary
To provide a transparent substrate with a laminated film which has a sufficiently high heat shielding property, even though it has a functional layer containing a specific metal nitride such as titanium nitride. A transparent substrate with a laminated film 10, which comprises a transparent substrate 12 and a laminated film 14 formed on at least one surface of the transparent substrate 12, wherein the laminated film 14 has a first dielectric layer 22, a crystallinity-improving layer 24, a functional layer 26 and a second dielectric layer 28 in this order from the transparent substrate 12 side, the crystallinity-improving layer 24 contains ZrNx (wherein x is higher than 1.2 and at most 2.0), the functional layer 26 contains at least one metal nitride selected from the group consisting of titanium nitride, chromium nitride, niobium nitride, molybdenum nitride and hafnium nitride, and the concentration of oxygen atoms at a boundary between the crystallinity-improving layer 24 and the functional layer 26, is at most 20 atom%.