Transport Device Move Out Prevention Mechanism Width Reduction
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Solution Overview
Problem
Conventional transport devices for disc-shaped substrates face challenges in reducing their dimensions during travel due to the outward extension of the move out prevention mechanism, which increases the width and complicates substrate handling.
Innovation Solution
The transport device incorporates a move out prevention mechanism with a contacting member that moves between contact and spaced apart positions, with the contact position set between the opening end and the central portion of the substrates, preventing substrate ejection while maintaining the contacting member inward of the opening, thus reducing the device's width during travel.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the contacting member extends from a location inward of the opening side end portion of the substrates to a location outward thereof in the direction along which the substrates are inserted and removed, then the substrates can be prevented from moving out of the storage container, but the width of the transport device increases
Solution Approach 1:
The contacting member is made movable between a first position where it contacts the side faces of the substrates to prevent them from moving out, and a second position where it is spaced apart from the substrates. This dynamic adjustment allows the device width to be reduced when substrate containment is not required, while maintaining reliability when needed.
Solution Approach 2:
The contacting member is divided into multiple contacting portions that can independently contact different substrates. This segmentation allows the mechanism to effectively prevent substrate ejection with a more compact structure, reducing the overall device width while maintaining containment reliability.
2Reliability
If the contacting member is moved to the contact position to prevent substrate ejection, then substrate containment is improved, but damage to substrates may occur during transfer operations
Solution Approach 1:
The contacting member is dynamically positioned between contact and spaced apart positions. During travel, it contacts the substrates to prevent ejection. During transfer operations, it is moved to the spaced apart position to avoid damaging the substrates, thus eliminating the harmful effect while maintaining containment reliability during transport.
Solution Approach 2:
The contacting member alternates between contact and spaced apart positions based on operational requirements. It contacts substrates during travel phases and spaces apart during transfer phases, creating a periodic action pattern that prevents both substrate ejection and damage.
Data Source
AI summary
A transport device includes a traveling holding member which can travel while holding a storage container, and a move out prevention mechanism which prevents substrates from moving out of an opening of the storage container. The move out prevention mechanism is configured to include a contacting member which can be moved between a contact position at which the contacting member is in contact with side faces of the substrates, and a spaced apart position at which the contacting member is spaced apart from the side faces of the substrates. The contact position is set such that the contacting member is located between an opening side end portion and a central portion of the substrates in a direction along which the substrates are inserted and removed.