Transport Vehicle Drone Integration for Semiconductor Load Port Handling
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Solution Overview
Problem
In semiconductor manufacturing, transport vehicles experience congestion due to the need for one vehicle to wait while another is loading or unloading, and there are challenges in reliably and efficiently loading/unloading articles due to shaking caused by rapid belt release. Additionally, adjusting position tags for accurate stopping can be hazardous for operators.
Innovation Solution
A transport system that includes a transport vehicle with a drone seating structure and a wireless power supply, allowing the drone to fly to and from load points independently, thereby reducing congestion and eliminating the need for rapid belt release. The drone includes a gripper for handling articles and a reader for identifying correct positions, with an anti-drop mechanism to prevent falls.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the belt is quickly released to reduce loading and unloading time, then the productivity is improved, but the shaking becomes severe which worsens the reliability
Solution Approach 1:
The patent extracts the hand from the transport vehicle and replaces it with a drone. The drone is deployed from the transport vehicle to perform article handling operations independently, eliminating the need for the belt mechanism that causes shaking when quickly released. This separation allows the transport vehicle to maintain stability while the drone performs rapid article transfer operations.
2Productivity
If multiple transport vehicles move along the same rail to increase productivity, then the productivity is improved, but congestion occurs which worsens the productivity
Solution Approach 1:
The patent segments the article handling function from the transport vehicle by introducing drones. Each transport vehicle can deploy its own drone independently to handle articles at load ports. This segmentation allows multiple transport vehicles to operate simultaneously on the same rail without waiting for sequential article handling, as each vehicle's drone can independently perform loading/unloading operations while the vehicle remains in motion or waits minimally.
3Measurement precision
If the operator adjusts the position tag manually to ensure accurate stopping, then the measurement precision is improved, but the ease of operation deteriorates due to high-level work risk
Solution Approach 1:
The patent implements self-service through the drone's autonomous navigation capabilities. The drone is equipped with positioning systems and sensors that enable it to autonomously identify and navigate to the correct load port positions without requiring manual tag adjustment by operators. The system automatically achieves accurate positioning through electronic means, eliminating the need for operators to perform hazardous high-level work on position tags.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables quick and reliable transportation of articles by reducing congestion and eliminating the need for rapid belt release, while also reducing operator risk by eliminating the need for high-level adjustments of position tags.
Implementation Method 1
a wireless power supply in the frame, the wireless power supply being configured to supply power to the drone during at least a portion of a period during which the drone is seated on the support structure
Implementation Method 2
a wing assembly connected to the body, the wing assembly being configured to generate a lift force to fly the drone
Implementation Method 3
a reader (e.g., an image sensor or a camera) on the leg, the reader being configured to read an information tag on a load port or the support structure
Data Source
AI summary
A transport vehicle includes: a frame having an internal area; a driver on top of the frame, the driver being configured to travel along a rail; a support structure in the internal area, the support structure being configured to seat, thereon, a drone configured to transport an article; and a controller configured to control an operation of at least one of the driver and the support structure.


