Transport Vehicle Drone Integration for Semiconductor Load Port Handling

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Solution Overview

Problem

In semiconductor manufacturing, transport vehicles experience congestion due to the need for one vehicle to wait while another is loading or unloading, and there are challenges in reliably and efficiently loading/unloading articles due to shaking caused by rapid belt release. Additionally, adjusting position tags for accurate stopping can be hazardous for operators.

Innovation Solution

A transport system that includes a transport vehicle with a drone seating structure and a wireless power supply, allowing the drone to fly to and from load points independently, thereby reducing congestion and eliminating the need for rapid belt release. The drone includes a gripper for handling articles and a reader for identifying correct positions, with an anti-drop mechanism to prevent falls.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the belt is quickly released to reduce loading and unloading time, then the productivity is improved, but the shaking becomes severe which worsens the reliability

Engineering Contradiction:
Improveloading and unloading timeVSAvoidarticle loading/unloading reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent extracts the hand from the transport vehicle and replaces it with a drone. The drone is deployed from the transport vehicle to perform article handling operations independently, eliminating the need for the belt mechanism that causes shaking when quickly released. This separation allows the transport vehicle to maintain stability while the drone performs rapid article transfer operations.

Inventive Principle:
Principle #2Taking out (Extraction)

2Productivity

If multiple transport vehicles move along the same rail to increase productivity, then the productivity is improved, but congestion occurs which worsens the productivity

Engineering Contradiction:
Improvetransport capacityVSAvoidcongestion time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent segments the article handling function from the transport vehicle by introducing drones. Each transport vehicle can deploy its own drone independently to handle articles at load ports. This segmentation allows multiple transport vehicles to operate simultaneously on the same rail without waiting for sequential article handling, as each vehicle's drone can independently perform loading/unloading operations while the vehicle remains in motion or waits minimally.

Inventive Principle:
Principle #1Segmentation

3Measurement precision

If the operator adjusts the position tag manually to ensure accurate stopping, then the measurement precision is improved, but the ease of operation deteriorates due to high-level work risk

Engineering Contradiction:
Improvestopping position accuracyVSAvoidoperator safety
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent implements self-service through the drone's autonomous navigation capabilities. The drone is equipped with positioning systems and sensors that enable it to autonomously identify and navigate to the correct load port positions without requiring manual tag adjustment by operators. The system automatically achieves accurate positioning through electronic means, eliminating the need for operators to perform hazardous high-level work on position tags.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables quick and reliable transportation of articles by reducing congestion and eliminating the need for rapid belt release, while also reducing operator risk by eliminating the need for high-level adjustments of position tags.

Implementation Method 1

a wireless power supply in the frame, the wireless power supply being configured to supply power to the drone during at least a portion of a period during which the drone is seated on the support structure

Methodology Applied
Scientific EffectWireless power supply: Electromagnetic Induction

Implementation Method 2

a wing assembly connected to the body, the wing assembly being configured to generate a lift force to fly the drone

Methodology Applied
Scientific EffectLift force: Aerofoil

Implementation Method 3

a reader (e.g., an image sensor or a camera) on the leg, the reader being configured to read an information tag on a load port or the support structure

Methodology Applied
Scientific EffectElectromagnetic reading: Electromagnetic Induction

Data Source

PatentUS20250136374A1Transport vehicle and transport system including the same
Publication Date: 2025.05.01 SAMSUNG ELECTRONICS CO LTD
  • US20250136374A1 patent drawing
  • US20250136374A1 patent drawing
  • US20250136374A1 patent drawing

AI summary

A transport vehicle includes: a frame having an internal area; a driver on top of the frame, the driver being configured to travel along a rail; a support structure in the internal area, the support structure being configured to seat, thereon, a drone configured to transport an article; and a controller configured to control an operation of at least one of the driver and the support structure.