Transport Position Recognition Using Dual Acceleration Sensors
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Solution Overview
Problem
Existing semiconductor manufacturing processes lack precise control over the execution of operations at specific positions within the manufacturing apparatus, leading to inefficiencies in transporting and processing workpieces.
Innovation Solution
An execution device equipped with first and second acceleration sensors and a control device that recognizes transport positions based on acceleration data, allowing automatic execution of predetermined operations, such as light emission, when the device reaches a predetermined location.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If transport position recognition is performed without acceleration sensors, then the device complexity is reduced, but the manufacturing precision and positioning accuracy deteriorate
Solution Approach 1:
The patent replaces complex mechanical positioning systems with acceleration sensors that detect transport state changes (acceleration/deceleration) to determine arrival at target positions. This substitution of mechanical positioning with inertial sensing resolves the contradiction by achieving high positioning accuracy through simpler sensor-based detection rather than complex mechanical positioning mechanisms.
2Productivity
If automatic operation execution at specific positions is implemented, then the productivity is improved, but the control system complexity increases
Solution Approach 1:
The execution device autonomously determines transport position based on acceleration sensor data and automatically executes operations without external control signals. The device serves itself by integrating position recognition and operation execution functions, eliminating the need for complex external control systems while maintaining high productivity through automated operation timing.
3Measurement precision
If precise transport position recognition is achieved using multiple acceleration sensors, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The patent divides the transport position detection function into multiple acceleration sensors positioned at different locations (first acceleration sensor for X-direction, second acceleration sensor for Y-direction). Each sensor independently detects acceleration in its specific direction, and the control device integrates these segmented detection results to achieve comprehensive two-dimensional position recognition, resolving the contradiction through functional segmentation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and automatic execution of operations at desired positions within the semiconductor manufacturing apparatus, enhancing the efficiency and accuracy of workpiece processing and transportation.
Implementation Method 1
The first acceleration sensor detects acceleration in a first direction along a horizontal direction
Implementation Method 2
The second acceleration sensor detects acceleration in a second direction intersecting the first direction along the horizontal direction
Data Source
AI summary
An execution device according to exemplary embodiments includes an operation device, a first acceleration sensor, a second acceleration sensor, and a control device. The operation device executes a predetermined operation. The first acceleration sensor detects acceleration in a first direction along a horizontal direction. The second acceleration sensor detects acceleration in a second direction intersecting the first direction along the horizontal direction. The control device recognizes a transport position of the execution device in the semiconductor manufacturing apparatus based on output values from the first acceleration sensor and the second acceleration sensor. When it is recognized that the execution device is transported to a predetermined position, the control device causes the operation device to execute the predetermined operation.