Trap Device for Volatile Liquid TEOS Condensation Control
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Solution Overview
Problem
The discharge of volatile liquid tetraethylorthosilicate (TEOS) from semiconductor process chambers can lead to uncontrolled condensation and safety hazards due to inadequate purging and temperature issues, causing fluctuations in gas flow that negatively impact waste stream abatement efficiency.
Innovation Solution
A trap device that separates and collects volatile liquids from the waste stream, selectively isolates them from the stream, and evaporates them back into a gaseous form for safe return, using filters, valves, and heating mechanisms to control the process and prevent accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If volatile liquid TEOS is discharged from the process chamber without sufficient purging, then the discharge process is simple, but uncontrolled condensation occurs downstream leading to safety hazards
Solution Approach 1:
The trap device is positioned in the exhaust line before the abatement device to preliminarily condense and collect volatile liquid TEOS. This preliminary action prevents uncontrolled condensation downstream by providing a designated collection point, thereby eliminating safety hazards while maintaining discharge process simplicity
Solution Approach 2:
The trap device acts as an intermediary component between the process chamber exhaust and the abatement device. It mediates the waste stream by separating and collecting liquid TEOS, preventing direct contact between volatile liquids and subsequent process streams, thus eliminating safety hazards without complicating the overall discharge process
2Device complexity
If liquid TEOS accumulates randomly within the pumping arrangement, then no additional collection infrastructure is needed, but gas flow fluctuations occur that reduce abatement efficiency
Solution Approach 1:
The trap device extracts liquid TEOS from the gas stream by providing a separate collection chamber. This extraction prevents random accumulation in the pumping arrangement, stabilizes gas flow, and maintains high abatement efficiency without requiring complex collection infrastructure
Solution Approach 2:
The trap device is designed to automatically collect and hold liquid TEOS as it condenses from the waste stream. The self-service mechanism eliminates the need for external collection infrastructure while preventing gas flow fluctuations that would reduce abatement efficiency
3Device complexity
If liquid TEOS accumulates in the pumping arrangement, then no additional trapping mechanism is required, but safety hazards increase due to reactions with fluorine and air
Solution Approach 1:
The trap device serves as an intermediary that isolates liquid TEOS in a dedicated collection chamber, preventing contact with fluorine and air. This intermediary function eliminates safety hazards from chemical reactions without requiring complex trapping mechanisms
Solution Approach 2:
The trap device extracts and separates liquid TEOS from the waste stream, removing it from the pumping arrangement where it could react with hazardous substances. This extraction eliminates safety hazards while keeping the trapping mechanism simple
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents random liquid accumulation, ensures safe handling of volatile compounds, and stabilizes gas flow to enhance the efficiency of waste stream abatement by returning liquids in gaseous form, thereby reducing safety hazards and improving processing efficiency.
Implementation Method 1
uncontrolled TEOS condensation downstream from the chamber exhaust
Implementation Method 2
means for evaporating the collected liquid compound to return the compound in gaseous form to the waste stream
Data Source
AI summary
A trap device includes means for separating a liquid compound from a waste stream exhaust from a process chamber, means for collecting the liquid compound separated from the waste stream, means for selectively isolating the collected liquid compound from the waste stream, and means for evaporating the collected liquid compound to return the compound in gaseous form to the waste stream. This can enable a volatile liquid to be collected at a defined location, isolated from the waste stream, and, when so desired, returned to the waste stream in the form of a gas for subsequent abatement.