Trap Mechanism Segmentation for Low Vapor Pressure Gas Collection
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Solution Overview
Problem
Existing trap mechanisms in film formation devices face challenges in efficiently cooling and liquefying gases with low vapor pressure, resulting in low collection efficiency of unreacted source gases.
Innovation Solution
A trap mechanism with a housing divided into multiple retention spaces and communication paths, where the exhaust gas is cooled and adiabatically expanded by changing exhaust conductance, allowing efficient cooling and liquefaction of the collection target gas, and an exhaust system with a bypass path to prevent inert gases from entering the trap mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If conventional trap mechanisms are used to cool and collect reaction byproducts, then collection efficiency is improved for high vapor pressure substances, but collection efficiency deteriorates for low vapor pressure gases that are hard to liquefy
Solution Approach 1:
The trap mechanism is divided into multiple retention spaces (first, second, third retention spaces) with communication paths between them. This segmentation allows the exhaust gas to be cooled in stages, with each space providing a controlled environment for progressive condensation of substances with different vapor pressures, thereby improving overall collection efficiency.
Solution Approach 2:
The invention changes the temperature parameter progressively through the retention spaces. The first retention space is cooled to a first temperature, the second to a lower second temperature, and the third to an even lower third temperature. This gradient temperature approach enables efficient condensation of low vapor pressure gases that cannot be effectively collected by conventional single-stage cooling methods.
2Quantity of substance
If cooling jacket units are added to cool communication paths, then collection efficiency is improved, but device complexity increases
Solution Approach 1:
The cooling jacket units are merged with the communication paths themselves. The communication paths are designed as cooling jackets that directly cool the exhaust gas flowing through them, eliminating the need for separate cooling systems. This integration achieves efficient cooling while minimizing structural complexity.
3Reliability
If bypass path is added to prevent inert gas contamination, then trap mechanism reliability is improved, but exhaust system complexity increases
Solution Approach 1:
A switching valve is introduced as an intermediary component that controls the flow path of exhaust gas. By opening or closing this valve, the system can selectively direct exhaust gas through the trap mechanism or bypass it, preventing inert gas contamination while maintaining simple operational control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient cooling and liquefaction of gases with low vapor pressure, improving collection efficiency and preventing contamination of the trap mechanism with inert gases.
Implementation Method 1
a cooling jacket unit configured to cool the communication path to thereby cool the exhaust gas
Implementation Method 2
the exhaust gas is adiabatically expanded by changing the exhaust conductance. This makes it possible to efficiently cool and liquefy the collection target gas
Data Source
AI summary
A trap mechanism is provided in the middle of an exhaust passage through which an exhaust gas, which is exhausted from a film formation device body that forms a thin film on the surface of a workpiece (W), flows, and recovers a gas to be collected that is contained in the exhaust gas by cooling and liquefying the gas to be collected. The trap mechanism includes: a housing having a gas inlet and a gas outlet; a partitioning member that partitions the inside of the housing into retention spaces; communication paths that communicate the retention spaces with one another; and cooling jackets that cool the communication paths to cool the exhaust gas. With this structure, the exhaust gas is adiabatically expanded while being cooled, and the gas to be collected is efficiently cooled and liquefied.