Trap Panel Orientation for Film Forming Exhaust Capture
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional trap mechanisms in film forming apparatuses suffer from reduced capture efficiency due to turbulent gas flows when exhaust gases encounter orthogonal trap surfaces, leading to escaped unreacted processing gases and by-products.
Innovation Solution
A trap assembly with trap units featuring trap panels oriented parallel to the exhaust gas flow direction, reducing turbulence and enhancing contact between gas species and trap surfaces, thereby improving capture efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If trap panels are oriented orthogonal to exhaust gas flow direction, then contact area between gas and panel surfaces is maximized, but turbulent flow is generated causing gas molecules to escape
Solution Approach 1:
The invention changes the orientation parameter of trap panels from orthogonal to parallel with respect to the exhaust gas flow direction. This parameter change reduces flow disturbance and turbulence while maintaining effective contact between gas molecules and trap panel surfaces, thereby resolving the contradiction between maximizing contact area and minimizing turbulent escape.
Solution Approach 2:
Instead of positioning trap panels orthogonal to the flow direction as conventionally done, the invention inverts this arrangement by positioning them parallel to the flow direction. This inverted configuration allows the gas flow to move along the panels rather than collide with them, reducing turbulence while maintaining capture efficiency.
2Object-affected harmful factors
If trap panels are oriented parallel to exhaust gas flow direction, then turbulent flow is reduced improving capture efficiency, but contact area between gas and panel surfaces is decreased
Solution Approach 1:
The invention transitions from a two-dimensional orthogonal contact model to a three-dimensional parallel flow model. By extending the trap panels along the flow direction, the effective contact area is maintained through increased panel length rather than width, while simultaneously reducing turbulent flow effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The parallel orientation of trap panels in the trap assembly significantly increases the capture rate of unreacted source gases and by-products, minimizing environmental pollution and economic waste by effectively containing condensable species.
Implementation Method 1
a trap device having a plurality of trap panels in a housing is used to confine the exhaust gas. When the exhaust gas flow encounters the trap panels, the unreacted processing gas, the reaction by-products and the like can adhere to the panel surfaces and thereby be intercepted
Data Source
AI summary
A trap mechanism for trapping exhaust gas from a process chamber. The trap assembly includes a housing containing a plurality of trap units. The plurality of trap units are arranged successively along a flow direction of said exhaust gas. Each trap unit includes a set of trap panels parallel to each other and spaced apart from each other. The two opposite surfaces with a larger area of each trap panel are oriented substantially parallel to a flow direction of the exhaust gas flow. The two opposite surfaces with a smaller area of each trap panels are oriented orthogonal to the exhaust gas flow.