Multi-Boat Tray Clamping for Vibration-Stable Semiconductor Boats
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Solution Overview
Problem
Semiconductor devices in boats within trays can move, vibrate, or rattle during transport, potentially causing damage due to the slight tolerance between the inner dimensions of the receiving well and the outer dimensions of the boat, affecting precise handling and processing.
Innovation Solution
A mechanically driven clamping mechanism that automatically engages and disengages based on the tray's position, securing boats within the tray to prevent movement and vibration, while allowing for suitable tolerances during handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a tray with receiving well is used to carry semiconductor device boats, then the boats can be transported and handled, but the boats can move, vibrate, or rattle during transport due to slight tolerance between dimensions
Solution Approach 1:
The clamping mechanism transitions between engaged and disengaged states dynamically. When the tray is removed from the designated location, the clamping mechanism engages to secure the boat. When the tray is positioned at the designated location, the clamping mechanism disengages to allow boat removal. This dynamic state change resolves the contradiction by providing stability during transport while enabling easy handling at processing stations.
Solution Approach 2:
The system changes the clamping force parameter from zero (disengaged state) to a securing level (engaged state) based on tray position. This parameter change allows the same mechanism to accommodate both stability requirements during transport and ease of operation requirements during handling.
2Stability of the object's composition
If a clamping mechanism is added to secure boats in the tray, then boat stability improves, but device complexity increases
Solution Approach 1:
The clamping mechanism is designed to engage and disengage automatically based on the tray's position relative to the designated location. The mechanism serves itself by using the tray's movement and the pin's position to trigger clamping action, eliminating the need for external control systems, motors, or complex actuation mechanisms.
Solution Approach 2:
The control function is extracted from the clamping mechanism itself and placed in the tray positioning system. The pin at the designated location acts as an external control element that, when present or absent, automatically triggers the clamping action. This extraction simplifies the clamping mechanism by removing the need for integrated sensors, motors, or control electronics.
3Reliability
If the clamping mechanism is automatically engaged when tray is removed from designated location, then boat security improves, but ease of operation for boat placement decreases
Solution Approach 1:
The clamping mechanism is designed to engage automatically as soon as the tray is removed from the designated location, before any boat movement or vibration can occur. This preliminary clamping action ensures boats are secured in advance, preventing any potential movement during transport while still allowing easy boat placement when the tray is stationary at the designated location.
Solution Approach 2:
The clamping mechanism operates periodically - disengaged when the tray is at the designated location for boat placement, and engaged when the tray is removed for transport. This periodic engagement pattern ensures boats are secured only when needed, maintaining ease of operation during placement while ensuring reliability during transport.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The clamping mechanism stabilizes boats during transport, reducing the risk of damage to semiconductor devices and ensuring precise placement for subsequent processing, while being simple and portable for use in high-temperature environments.
Implementation Method 1
a spring member arranged within the housing and operable to apply a force to the plunger in a direction of the head
Data Source
AI summary
A tray of an automated handling system for transporting semiconductor devices includes: a receiving region that is configured to receive a boat, the boat carrying one or more semiconductor devices thereon; and a clamping mechanism that selectively clamps the boat, residing in the receiving region, to the tray. Suitably, the clamping mechanism is automatically disengaged when the tray is positioned in a designated location and automatically engaged when the tray is not positioned in the designated location, such that, when engaged, the clamping mechanism holds the boat, residing in the boat receiving region, securely within the tray, and when disengaged, the clamping mechanism releases the boat residing in the boat receiving region.