Tray Handling Apparatus for Simultaneous Inversion and Conveyance
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Solution Overview
Problem
Conventional semiconductor device inspecting apparatuses have a complex configuration due to separate inverting and transfer devices, which hinders simultaneous inversion and conveyance of trays, resulting in inefficient inspection and sorting processes.
Innovation Solution
A tray handling apparatus with a transfer device integrally provided with an inverting unit at its lower end, allowing for simultaneous conveyance and inversion of trays, enabling both surfaces of semiconductor devices to be inspected efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If separate inverting device and transfer device are used, then tray inversion and conveyance can be performed independently, but device complexity increases and simultaneous operation cannot be achieved
Solution Approach 1:
The patent combines the inverting device and transfer device into a single integrated unit. The transfer device includes a tray holding portion that can be inverted by an inverting mechanism while being conveyed by a conveyance mechanism, allowing both functions to be performed simultaneously by one device rather than requiring separate independent devices
2Productivity
If separate inverting device and transfer device are used, then each device can be optimized independently, but inspection time increases due to sequential operation
Solution Approach 1:
The integrated transfer device enables continuous operation by performing tray conveyance and inversion simultaneously in one continuous motion sequence, eliminating the idle time between sequential operations of separate devices. The tray is conveyed to the inspection position, inverted, and conveyed back without interruption, maintaining continuous productive action throughout the handling cycle
3Productivity
If sequential inversion and conveyance are performed, then device configuration is simplified, but inspection efficiency decreases
Solution Approach 1:
The transfer device is designed as a multi-functional unit that simultaneously performs conveyance, positioning, and inversion functions. The device includes a conveyance mechanism for moving trays between positions and an inverting mechanism with a tray holding portion that can rotate to invert the tray, allowing one device to fulfill multiple roles that would otherwise require separate specialized devices
Data Source
AI summary
Disclosed is a tray handling apparatus in which the conveyance and inversion of a tray can be performed simultaneously to thereby achieve a rapid inspecting operation and a simplified apparatus configuration, and a semiconductor device inspecting method using the tray handling apparatus. The tray handling apparatus includes an inverting unit to turn the tray, in which objects are received, upside down, and a transfer device to convey the object receiving tray from one conveyor to another conveyor while being reciprocally moved above a body of the apparatus. The inverting unit is integrally provided at a lower end of the transfer device, to allow the conveyance and inversion of the tray to be performed simultaneously.


