Tray Support Counterbore for Vacuum Processing Thermal Warpage
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Solution Overview
Problem
Large-sized trays used in vacuum processing apparatuses experience deformation due to temperature changes, leading to positional deviations and nonuniform temperature distribution, which can cause transport errors and gas leaks, limiting the size of substrates that can be held.
Innovation Solution
A tray support system with a counterbore portion that prevents the tray's edge from contacting the support member, allowing for thermal expansion without warping and maintaining accurate temperature control, even with larger trays capable of holding more substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large-sized tray is used to hold more substrates, then productivity is improved, but tray warpage due to temperature change increases causing positional deviations and gas leaks
Solution Approach 1:
The tray support structure is segmented into multiple support points distributed across the tray bottom. This segmentation allows each support point to independently manage local thermal expansion, preventing overall tray warpage while maintaining positional accuracy for large substrate capacity
Solution Approach 2:
The support structure incorporates compliant elements and adjustable support points that anticipate thermal expansion before it causes warpage. This beforehand cushioning allows the tray to accommodate temperature changes without developing positional deviations, enabling both large size and high precision
2Measurement precision
If heating gas is supplied to control substrate temperature, then temperature control accuracy is improved, but tray warpage due to thermal expansion increases
Solution Approach 1:
The support structure acts as an intermediary between the heated tray and the fixed mounting position. It absorbs thermal expansion through compliant elements while maintaining the tray's operational position, thus preventing warpage while allowing effective temperature control via heating gas
Solution Approach 2:
The support system allows dynamic adjustment of support characteristics in response to temperature changes. As temperature increases, the support structure modifies its mechanical properties to accommodate expansion, maintaining tray shape stability throughout the heating process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses tray warpage and positional deviations, ensuring high-accuracy temperature control and increased productivity by allowing for larger substrate capacity without compromising processing accuracy or causing gas leaks.
Implementation Method 1
the counterbore portion does not abut against the tray, and when the tray is supported by the tray support member, an edge of an outer side surface of the tray is positioned above the counterbore portion and does not contact the tray support member
Implementation Method 2
the arm comprises a support portion which abuts against a lower portion of the tray
Data Source
AI summary
A vacuum processing apparatus includes a tray configured to hold a substrate, a tray support member including an arm configured to support the tray, and a holder to which the tray support member is attached. The arm includes a support portion which abuts against a lower portion of the tray, and a counterbore portion formed into a recessed shape below an edge of the tray such that the counterbore portion does not abut against the tray. When the tray is supported by the tray support member, an edge of an outer side surface of the tray is positioned above the counterbore portion and does not contact the tray support member, and the tray support member is configured to support the tray while pushing the tray against the holder. The tray is configured to form a space with the holder when pushed against the holder while holding the substrate and includes, on a side of the holder, a substantially ring-like projection configured to abut against the holder. The tray also includes an outer tray to be held by the tray support member, and an inner tray to be held by the outer tray, and when the outer tray is pushed against the holder, the inner tray alone abuts against the holder.