Treatment Solution Supply Apparatus Pressure-Feeding Filter

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Solution Overview

Problem

Existing treatment solution supply apparatuses face challenges in effectively removing particles from treatment solutions due to varying hydraulic pressures caused by positional relations and piping configurations, leading to inconsistent particle collection efficiency, especially when installed in highland environments.

Innovation Solution

A treatment solution supply apparatus with a temporary storage unit that includes a pressure-feeding function to maintain a desired hydraulic pressure, ensuring effective particle removal through a filter regardless of installation conditions or apparatus layout.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a filter is provided in the treatment solution supply route to remove particles, then particle removal function is improved, but particle collection efficiency becomes inconsistent due to varying hydraulic pressure

Engineering Contradiction:
Improveparticle removal functionVSAvoidparticle collection efficiency
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The invention changes the pressure parameter by introducing a pressurization unit that actively controls and maintains desired hydraulic pressure in the treatment solution before it passes through the filter. This ensures consistent particle collection efficiency regardless of installation conditions or positional relations between components.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If the buffer tank is positioned relative to the filter according to conventional layout, then apparatus structure is simplified, but desired hydraulic pressure cannot be obtained due to positional relation and piping configuration

Engineering Contradiction:
Improveapparatus structureVSAvoidhydraulic pressure
Core Design Contradiction:
Device complexityVSStress or pressure

Solution Approach 1:

The invention applies pneumatic/hydraulic principles by introducing a pressurization unit that uses gas or liquid pressure to feed the treatment solution through the filter at desired pressure, overcoming the limitations imposed by positional relations and piping configurations between the buffer tank and filter.

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Adaptability or versatility

If the treatment solution supply apparatus is installed in highland environments, then installation flexibility is improved, but desired hydraulic pressure cannot be obtained

Engineering Contradiction:
Improveinstallation flexibilityVSAvoidhydraulic pressure
Core Design Contradiction:
Adaptability or versatilityVSStress or pressure

Solution Approach 1:

The pressurization unit actively adjusts and maintains the hydraulic pressure parameter regardless of installation environment, enabling the apparatus to achieve desired particle removal performance whether installed in highland, lowland, or other locations with varying gravitational and atmospheric conditions.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus ensures consistent and efficient particle removal from treatment solutions by maintaining a desired hydraulic pressure, preventing bubble generation and minimizing contact between the solution and air, thus reducing defects in the treatment process.

Implementation Method 1

a filter that removes a foreign substance in the treatment solution from the temporary storage apparatus

Methodology Applied
Scientific EffectFiltration: Filter (physical)

Implementation Method 2

a pump that sends the treatment solution from which the foreign substance has been removed by the filter to the treatment solution discharge unit

Methodology Applied
Scientific EffectPumping: Pump

Data Source

PatentUS10518199B2Treatment solution supply apparatus
Publication Date: 2019.12.31 TOKYO ELECTRON LTD
  • US10518199B2 patent drawing
  • US10518199B2 patent drawing
  • US10518199B2 patent drawing

AI summary

A treatment solution supply apparatus for supplying a treatment solution to a treatment solution discharge unit that discharges the treatment solution to a treatment body, includes: a temporary storage apparatus that temporarily stores the treatment solution supplied from a treatment solution supply source that stores the treatment solution; a filter that removes a foreign substance in the treatment solution from the temporary storage apparatus; and a pump that sends the treatment solution from which the foreign substance has been removed by the filter to the treatment solution discharge unit, wherein the temporary storage apparatus has a pressure-feeding function of pressure-feeding the treatment solution stored in the temporary storage apparatus.