Trench Capacitor Acute Wall Open Mode Failure
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional trench capacitors typically fail in a short circuit mode due to dielectric breakdown, which can lead to unintended electric current application and circuit malfunction or breakage, whereas an open mode failure is desirable to prevent such issues.
Innovation Solution
The design incorporates a trench capacitor with a base member featuring acute angled walls and a protective layer with through holes, strategically positioned to induce dielectric breakdown in a manner that causes an open mode failure, preventing short circuits by directing molten material outside the capacitor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If dielectric breakdown occurs in conventional trench capacitors, then a failure mode occurs, but it results in a short circuit mode that can cause unintended electric current application and circuit malfunction
Solution Approach 1:
The patent converts the harmful effect of dielectric breakdown (which normally causes short circuits) into a beneficial open mode failure. By designing the wall with an acute angle at the distal end, the breakdown path is directed outward through the through hole, causing the capacitor to fail open rather than short, thus preventing harmful short circuit currents while maintaining safety.
Solution Approach 2:
The patent implements preliminary action by pre-configuring the wall geometry with an acute angle at the distal end and providing a through hole before dielectric breakdown occurs. This pre-arranged structure ensures that when breakdown happens, the failure path is already determined to be outward through the through hole, preventing short circuit formation before it can occur.
2Reliability
If the wall structure is modified to induce open mode failure, then failure safety is improved, but the manufacturing precision requirements increase
Solution Approach 1:
The patent applies parameter changes by modifying the wall geometry to have an acute angle at the distal end, specifically designing the angle to be less than 90 degrees. This parameter change in the wall structure creates the desired failure mode without requiring extremely tight tolerances, as the acute angle configuration naturally directs the breakdown path outward.
3Object-generated harmful factors
If through holes are added to direct molten material outward, then short circuit prevention is improved, but device complexity increases
Solution Approach 1:
The patent applies segmentation by creating a through hole that divides the wall structure into separate regions. This segmentation allows the molten material from dielectric breakdown to be directed outward through the through hole rather than remaining trapped inside, preventing short circuits while adding minimal structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively induces an open mode failure in the trench capacitor due to dielectric breakdown, preventing short circuits and ensuring safe failure by directing molten material away from internal components.
Implementation Method 1
the first wall includes a first portion having an acute angle at a distal end thereof in a section including the first direction and the depth direction
Implementation Method 2
Joule's heat is generated by an electric current flowing through a broken-down area of the dielectric layer and melts part of the electrode layers
Data Source
AI summary
A trench capacitor according to one embodiment of the present invention includes a base member with an upper surface having a plurality of trenches provided therein and an MIM structure provided on the base member so as to be embedded in the plurality of trenches. In the embodiment, the plurality of trenches include a first trench and a second trench adjacent to the first trench in a first direction orthogonal to a depth direction of the plurality of trenches. The base member includes a first wall separating the first trench from the second trench. The first wall includes a first portion having an acute angle at a distal end thereof in a section including the first direction and the depth direction.