Vertical Trench Capacitor Layout for Dense Superconducting Qubits

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Solution Overview

Problem

The large size of state-of-the-art superconducting qubits limits their scalability to millions on a chip, primarily due to microwave losses from two-level-system (TLS) defects at the capacitor interfaces, which increase with the size of the qubits.

Innovation Solution

A trench capacitor device is designed with superconducting electrodes extending into the substrate, where the first electrode is circumferentially enclosed by the second electrode, allowing for a vertical capacitor design that reduces the footprint while maintaining low microwave losses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a planar capacitor design is used, then the fabrication process is simple and easy to manufacture, but the capacitor requires a much larger area footprint

Engineering Contradiction:
Improvefabrication simplicityVSAvoidcapacitor footprint
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The patent transitions from a planar (2D) capacitor design to a three-dimensional vertical trench capacitor design. The capacitor electrodes are arranged vertically within trenches etched into the substrate, utilizing the vertical dimension to increase capacitance density while reducing the horizontal footprint on the chip.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs a nested structure where one capacitor electrode is positioned inside another electrode within the same trench. This nested arrangement maximizes the use of vertical space and allows for increased capacitance within a compact footprint by effectively nesting functional elements within each other.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If the qubit size is increased to reduce microwave losses from TLS defects, then coherence time is improved, but scalability to millions of qubits on a chip is limited

Engineering Contradiction:
Improvecoherence timeVSAvoidqubit density
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

By moving to a vertical trench capacitor design, the patent reduces the horizontal footprint of each qubit while maintaining the capacitor size needed for low TLS losses. This dimensional transition allows more qubits to be packed into the same chip area, enabling scalability to millions of qubits.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the geometric parameters of the capacitor from a planar configuration to a vertical trench configuration with specific aspect ratios. This parameter change allows the capacitor to maintain sufficient surface area for low TLS losses while occupying less horizontal space, thereby increasing qubit density.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The trench capacitor design enables a reduced footprint for superconducting qubit devices while minimizing microwave losses and crosstalk between adjacent circuitry, facilitating the creation of high-density quantum circuits.

Implementation Method 1

a first capacitor electrode and a second capacitor electrode, each a superconductor and extending into the substrate

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Implementation Method 2

the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode

Methodology Applied
Scientific EffectElectric field confinement: Electric Field

Data Source

PatentUS12336195B2Trench capacitor device for superconducting electronic circuit and superconducting qubit device
Publication Date: 2025.06.17 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US12336195B2 patent drawing
  • US12336195B2 patent drawing
  • US12336195B2 patent drawing

AI summary

The disclosure relates to a trench capacitor device for a superconducting electronic circuit. The trench capacitor device includes a substrate, a first capacitor electrode, and a second capacitor electrode, each electrode including a superconductor and extending into the substrate. The first electrode is circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.