Trench Gate Semiconductor Device dV/dt Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing semiconductor devices face a trade-off between improving dV/dt controllability and reducing losses during the turn-off switching period, with methods either increasing ON-voltage or decreasing breakdown voltage, and there is a need for a solution that maintains low loss and high breakdown voltage.

Innovation Solution

A semiconductor device with a wide trench structure and a polysilicon electrode connected to the emitter electrode, which reduces feedback capacity and enhances breakdown voltage by dispersing the electric field, while omitting the floating p-layer to improve dV/dt controllability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a floating p-layer is electrically connected to the emitter electrode through a resistance to improve dV/dt controllability, then the controllability of dV/dt increases, but the ON-voltage increases and loss increases

Engineering Contradiction:
ImprovedV/dt controllabilityVSAvoidloss
Core Design Contradiction:
Ease of operationVSLoss of energy

Solution Approach 1:

The invention extracts and removes the floating p-layer from the semiconductor device structure. By eliminating this layer entirely rather than connecting it through a resistance, the device avoids the trade-off between dV/dt controllability and loss, achieving both improved controllability and reduced energy loss.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention changes the structural dimension by transitioning from a planar structure with a floating p-layer to a trench gate structure. This dimensional change allows the gate electrode to be positioned in a trench, creating a different electric field distribution that improves dV/dt controllability without the need for a floating p-layer connection, thereby reducing loss.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Loss of energy

If the resistance between the floating p-layer and emitter electrode is increased to reduce ON-voltage increase, then the ON-voltage increase becomes small, but the controllability of dV/dt decreases

Engineering Contradiction:
ImprovelossVSAvoiddV/dt controllability
Core Design Contradiction:
Loss of energyVSEase of operation

Solution Approach 1:

The invention removes the floating p-layer entirely from the device structure, eliminating the need to choose an optimal resistance value. This extraction resolves the contradiction by providing a different mechanism for dV/dt control through the trench gate structure, achieving both low loss and high controllability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention changes the structural parameters by introducing a trench gate configuration with specific width and depth dimensions. This parameter change creates a different electric field distribution that provides superior dV/dt controllability compared to the floating p-layer approach, while maintaining low ON-voltage and loss.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If a trench structure is formed to increase switching speed and reduce switching loss, then the switching speed increases, but the breakdown voltage may decrease due to electric field concentration at trench corners

Engineering Contradiction:
Improveswitching speedVSAvoidbreakdown voltage
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The invention applies local quality by creating a specific trench geometry where the gate electrode is positioned within the trench. The trench width is controlled to be a specific proportion of the drift layer thickness, creating a localized electric field distribution that avoids concentration at corners while maintaining high switching speed and preventing breakdown.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention uses a curved or rounded trench profile rather than sharp corners. This curvature eliminates electric field concentration at the trench corners, preventing breakdown while maintaining the high switching speed benefits of the trench structure. The rounded profile distributes the electric field more uniformly.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively improves dV/dt controllability during the turn-off switching period while maintaining low loss and high breakdown voltage, reducing feedback capacity and suppressing potential rise, thus balancing controllability and reliability.

Implementation Method 1

a polysilicon electrode connected to the emitter electrode, which reduces feedback capacity and enhances breakdown voltage by dispersing the electric field

Methodology Applied
Scientific EffectElectric field dispersion: Electric Field

Data Source

PatentEP2482319B1Semiconductor devices and power conversion systems
Publication Date: 2020.04.22 HITACHI POWER SEMICON DEVICE LTD
  • EP2482319B1 patent drawingFigure 1
  • EP2482319B1 patent drawingFigure 2A
  • EP2482319B1 patent drawingFigure 2B

AI summary

A semiconductor device which includes: a first semiconductor layer (4) of a first conductivity type; a second semiconductor layer (2) of a second conductivity type that is formed near a surface of the first semiconductor layer (4); a first main electrode (11) that is electrically connected to the second semiconductor layer (2); a third semiconductor layer (6) of the second conductivity type that neighbors the first semiconductor layer (4) and is formed near a surface of the first semiconductor layer (4) opposite to the second semiconductor layer (2); a fourth semiconductor layer (7) of the first conductivity type that is selectively disposed in an upper portion of the third semiconductor layer (6); a second main electrode (14) that is electrically connected to the third semiconductor layer (6) and the fourth semiconductor layer (7); a trench (17) whose side face is in contact with the third semiconductor layer (6) and the fourth semiconductor layer (7), while reaching the first semiconductor layer (4); a gate electrode (9) that is formed along the side face of the trench (17) by a sidewall of polysilicon; and a polysilicon electrode (18) that is disposed away from the gate electrode (9) within the trench (17) and electrically connected to the second main electrode (14).