Trench-Grooved Gas Generation for Higher Ozone Concentration

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Solution Overview

Problem

Existing ozone production devices face challenges in achieving higher concentrations of ozone gas production at the same voltage or producing the same concentration of ozone gas at a lower voltage.

Innovation Solution

The gas generation device incorporates specific ratios for trench groove pitch and volume, a cooling flow channel design, and adjustable interelectrode distances to optimize gas production efficiency, including trench grooves with a pitch ratio of 0.0020 to 0.0150 and trench space to gas introducing space volume ratio of 0.016 to 0.203, along with a cooling flow channel design and shim member insertion for precise distance adjustment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional groove structures are used on electrodes, then gas flow is improved, but ozone production efficiency cannot be further enhanced

Engineering Contradiction:
Improveozone production efficiencyVSAvoidelectrode structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The electrode surface is segmented into multiple trench grooves that divide the discharge space into distinct regions. This segmentation creates multiple localized discharge zones, increasing the overall ozone production efficiency while maintaining a manageable structural complexity through standardized groove patterns

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Specific geometric parameters of the trench grooves are optimized to enhance performance: the pitch ratio P/D is set to 0.0020-0.0150 and the volume ratio VT/VG is set to 0.016-0.203. These parameter changes maximize gas flow efficiency and discharge uniformity, thereby improving ozone production without excessive structural complexity

Inventive Principle:
Principle #35Parameter changes

2Productivity

If higher voltage is applied to increase ozone concentration, then production efficiency improves, but energy consumption and electrode damage increase

Engineering Contradiction:
Improveozone concentrationVSAvoidenergy consumption
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The invention changes the geometric parameters of the electrode structure (trench groove pitch and volume ratios) to optimize the discharge characteristics. This allows achieving higher ozone concentrations through improved gas flow and discharge uniformity rather than simply increasing voltage, thereby reducing energy consumption and electrode stress

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The trench grooves create localized regions with optimized electric field distribution and gas flow characteristics. This local optimization ensures efficient ozone production in each discharge zone, achieving high overall concentration without requiring excessive voltage that would increase energy consumption and electrode damage

Inventive Principle:
Principle #3Local quality

3Productivity

If trench grooves are added to improve gas flow, then ozone production efficiency increases, but pressure loss increases

Engineering Contradiction:
Improveozone production efficiencyVSAvoidpressure loss
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The pitch ratio P/D and volume ratio VT/VG of the trench grooves are carefully optimized to balance gas flow enhancement with pressure loss minimization. These parameter changes ensure that the grooves improve discharge uniformity and ozone production efficiency while maintaining acceptable pressure characteristics for practical operation

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances ozone gas production efficiency by reducing local discharge and pressure loss, allowing for higher concentrations at the same voltage or lower concentrations at reduced voltage, while minimizing electrode damage and ensuring uniform cooling.

Implementation Method 1

generated gas generated from the material gas due to discharge produced in the discharge space when a voltage is applied across the first electrode surface and the second electrode surface

Methodology Applied
Scientific EffectElectrical discharge: Electric Arc

Implementation Method 2

a cooling flow channel through which a cooling medium is caused to flow is formed in the base member

Methodology Applied
Scientific EffectConvection cooling: Convection

Data Source

PatentEP4640624A1Gas generation device
Publication Date: 2025.10.29 EBARA CORP
  • EP4640624A1 patent drawingFigure 1~2
  • EP4640624A1 patent drawingFigure 3~4
  • EP4640624A1 patent drawingFigure 5

AI summary

A plurality of trench grooves (8) are formed on a first electrode (6) of a gas generation device (1), and a discharge space (12) formed between a first electrode surface (7) and a second electrode surface (11) is connected to a gas introducing space (17) for introducing material gas through a material gas supply inlet (4). A ratio P/D of a pitch P of the trench grooves (8) to a diameter D of the first electrode (6) is set at 0.0020 to 0.0150, and a ratio VT/VG of a volume VT of a trench space formed by the trench grooves (8) to a volume VG of the gas introducing space (17) is set at 0.016 to 0.203.