Triaminotin Composition for Long-Term Purity Stability
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Solution Overview
Problem
High-purity hydrocarbyl tin compounds, such as triaminotin compounds, are difficult to maintain over time due to their high reactivity and decomposability, especially when carbon, nitrogen, and oxygen are bonded to tin, leading to decomposition issues.
Innovation Solution
A specific formulation of a tin compound containing 95 mol% or more of a triaminotin compound and trace amounts of tetraaminotin compound, along with other specific tin compounds, is developed to suppress decomposition and maintain high purity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If triaminotin compound is used as CVD material, then film formation quality is improved, but decomposition occurs over time due to high reactivity
Solution Approach 1:
The patent introduces a specific additive (triethylamine or tetrahydrofuran) as an intermediary substance that mediates between the reactive triaminotin compound and the environment. This additive acts as a protective agent that suppresses decomposition reactions while allowing the triaminotin compound to maintain its film-forming capabilities. The additive concentration is precisely controlled at 0.1-5 mol% relative to the triaminotin compound to achieve optimal protection without interfering with the desired chemical vapor deposition process.
2Manufacturing precision
If high purity triaminotin compound is produced, then film quality is improved, but long-term purity maintenance becomes difficult
Solution Approach 1:
The patent applies preliminary action by adding the protective additive (triethylamine or tetrahydrofuran) to the triaminotin compound during the manufacturing stage, before storage begins. This preliminary protective measure is incorporated into the compound formulation itself, creating a stable mixture that resists decomposition over time. The additive is mixed in specific proportions (0.1-5 mol%) to ensure long-term stability while maintaining the high purity characteristics needed for quality film formation.
Data Source
Figure 1(a)~1(c)
Figure 2(a)~2(c)
Figure 3
AI summary
A high-purity tin compound that can maintain high purity for a long time, in particular, in which decomposition of a triaminotin compound is suppressed and high purity of the triaminotin compound is maintained, is provided as follows. The tin compound contains 95 mol% or more of a triaminotin compound having formula (1) in terms of tin atoms, and 0.001 to 0.5 mol% of a tetraaminotin compound having formula (2) in terms of tin atoms: RSn(NR'2)3 (1) Sn(NR'2)4 (2) wherein R is a hydrocarbon group having 1 to 30 carbon atoms which is optionally substituted with a halogen, an oxygen atom, or a nitrogen atom, and R's are each a hydrocarbon group having 1 to 10 carbon atoms and may be identical or different from each other; two R's on the same nitrogen atom may be bonded to each other to form a 3- to 7-membered ring containing nitrogen.