Triangular sensing elements and hexagonal sections for detector arrays

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Solution Overview

Problem

Existing charged particle detectors face inefficiencies due to the high number of switching regions and control logics required between adjacent sensing elements, which can lead to increased dead areas and reduced detection performance, particularly when the shape of sensing elements depends on their configuration.

Innovation Solution

The use of triangular-shaped sensing elements and hexagonal sections in the detector array reduces the number of switches and control logics needed, allowing for improved detection performance by conforming better to the shape of the electron beam spot and optimizing the arrangement of signal paths, thereby enhancing the signal-to-noise ratio and simplifying circuit design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If square shaped sensing elements are used with four sides, then each sensing element can be connected with adjacent sensing elements on each side, but the number of switching regions increases to four per sensing element, increasing device complexity

Engineering Contradiction:
Improveconnection capabilityVSAvoidnumber of switching regions
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies asymmetry by changing the sensing element shape from square (4 sides) to triangular (3 sides). This asymmetric modification reduces the number of switching regions from 4 to 3 per sensing element, directly decreasing device complexity while maintaining the essential connection capability through the remaining sides.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent changes the geometric parameter of the sensing element from a quadrilateral (square) to a triangle. This parameter change fundamentally alters the number of sides from 4 to 3, thereby reducing the number of switching regions and control logics required, while still allowing adjacent sensing elements to be connected on each side.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If more switching regions are provided between sensing elements, then more connections can be made, but the dead area increases and detection performance decreases

Engineering Contradiction:
Improvenumber of connectionsVSAvoiddetection performance
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

By using triangular sensing elements with 3 sides instead of square elements with 4 sides, the patent reduces the number of switching regions while minimizing dead area. The asymmetric triangular shape allows for more efficient packing and reduced isolation areas between elements, improving detection performance.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

Changing the geometric parameter from 4-sided to 3-sided elements reduces the total number of switching regions in the array. This parameter change directly reduces the dead area proportion and increases the active detection area, thereby improving detection performance and signal-to-noise ratio.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If the number of control logics is reduced, then device complexity decreases, but the ability to control switches between sensing elements may be limited

Engineering Contradiction:
Improvenumber of control logicsVSAvoidcontrol capability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The triangular geometry with 3 sides naturally reduces the control logic requirements from 4 to 3 per sensing element. The asymmetric shape maintains sufficient control capability by allowing connections on each side while reducing the total number of control signals needed, achieving a better balance between complexity and functionality.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

By changing the geometric parameter from 4-sided to 3-sided elements, the patent reduces the number of control logics required. This parameter change maintains essential control capability through the remaining 3 sides while decreasing overall device complexity and control signal requirements.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11594395B2Pixel shape and section shape selection for large active area high speed detector
Publication Date: 2023.02.28 ASML NETHERLANDS BV
  • US11594395B2 patent drawing
  • US11594395B2 patent drawing
  • US11594395B2 patent drawing

AI summary

Detectors and detection systems are disclosed. According to certain embodiments, a detector comprises a substrate comprising a plurality of sensing elements including a first sensing element and a second sensing element, wherein at least the first sensing element is formed in a triangular shape. The detector may include a switching region configured to connect the first sensing 5 element and the second sensing element. There may also be provided a plurality of sections including a first section connecting a first plurality of sensing elements to a first output and a second section connecting a second plurality of sensing elements to a second output. The section may be provided in a hexagonal shape.