Triangulation Sensor Beam Folding for Scribe Focus Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for precisely controlling the focal point of a scribe beam on substrates with uneven surfaces are inefficient, as they require complex setups or block the optical path when trying to measure distance from the same side as the scribe laser, leading to errors and increased system complexity.
Innovation Solution
A triangulation-based distance sensor system is used, with a scribe laser and a triangulation laser, where the triangulation laser's beam is reflected from the substrate and detected, allowing the focus lens to adjust the scribe beam's focal point accurately without blocking the optical path, using mirrors to fold the beam path and maintain the focal cone's integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the triangulation-based distance sensor is positioned on the same side as the scribe optical path to measure distance from the same side of the substrate, then the measurement can be performed without blocking the optical path, but the beam paths may interfere with each other requiring complex mirror arrangements
Solution Approach 1:
The triangulation laser beam is directed at an angle (e.g., 45 degrees) relative to the substrate surface, while the scribe beam travels perpendicular to the substrate. This angular differentiation creates distinct spatial dimensions for the two beam paths, allowing them to coexist on the same side of the substrate without interference or blocking, thus resolving the contradiction between ease of operation and device complexity
Solution Approach 2:
Mirrors are introduced as intermediary elements to redirect the triangulation laser beam at the required angle and to direct the reflected beam from the substrate to the detector. These mirrors act as mediators that enable the triangulation measurement path to be configured independently from the scribe beam path, allowing both functions to operate simultaneously without mutual interference
2Manufacturing precision
If the scribe beam is focused precisely on uneven substrate surfaces, then scribing accuracy is improved, but the system requires complex focus adjustment mechanisms to track surface contours
Solution Approach 1:
The triangulation-based distance sensor provides real-time feedback on the substrate surface position by measuring the distance to the substrate at each scribe location. This distance information is fed back to the focus adjustment mechanism, which automatically adjusts the scribe beam focal point to maintain precise focus on the substrate surface even when the surface is uneven, thus achieving high scribing accuracy without requiring complex manual intervention
Solution Approach 2:
The system uses the triangulation sensor to automatically detect and compensate for substrate surface variations without external intervention. The focus adjustment mechanism self-regulates based on the real-time distance measurements, enabling the system to maintain precise focus on uneven surfaces through autonomous operation rather than requiring complex external control systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise and efficient adjustment of the scribe beam's focal point on substrates with varying surfaces, maintaining the optical path's integrity and reducing system complexity, allowing for accurate scribing even on uneven substrates.
Implementation Method 1
a first laser beam from the triangulation laser is substantially perpendicular to the scribe optical path, is reflected from the electrochromic lite, and then detected by the detector
Implementation Method 2
A scribe beam from the scribe laser is configured to impinge upon the electrochromic lite from the second side and to define a scribe optical path such that the scribe beam is substantially perpendicular to the second side of the electrochromic lite. The scribe beam is configured to ablate the electrochromic device.
Implementation Method 3
The triangulation-based distance sensor further includes a first mirror oriented to reflect the first laser beam from the triangulation laser that is substantially perpendicular to the scribe optical path to substantially accommodate the scribe optical path
Data Source
AI summary
This disclosure provides apparatus and methods for scribing a substrate. In one aspect, an apparatus includes optics for focusing a scribe beam onto a substrate and a beam focus adjustment mechanism for adjusting the optics. A triangulation-based distance sensor determines a distance between the triangulation-based distance sensor and the substrate, with the triangulation-based distance sensor being positioned at a location offset from the scribe beam. Reflecting elements are positioned to reflect an incident beam from the triangulation-based distance sensor's source to the substrate and then back to the triangulation-based distance sensor's detector. The beam focus adjustment mechanism adjusts the optics based on the distance between the triangulation-based distance sensor and the substrate so that the scribe beam is focused at a desired position on the substrate.