Triangulation Sensor In-Situ Calibration Using Transmissive Device

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Solution Overview

Problem

Triangulation displacement sensors require frequent calibration due to systematic errors and environmental changes, which is time-consuming and disruptive, as they typically need external gauge standards moved in and out of the system for calibration.

Innovation Solution

A distance measurement apparatus using a transmissive device with predefined reference surfaces that acts as an internal gauge standard, allowing for in-situ calibration without moving parts, by correlating radiation beam reflections from the device with reflections from an object, enabling calibration during actual measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If external gauge standards are moved in and out of the system for calibration, then measurement accuracy can be maintained, but system downtime increases and operational continuity is disrupted

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidsystem downtime
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent combines the calibration function and measurement function into a single integrated system. The transmissive device with predefined reference surfaces serves dual purposes: it acts as both the calibration reference standard and the measurement target. This merging eliminates the need to remove calibration standards from the system, allowing continuous operation while maintaining measurement accuracy through real-time calibration capability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system performs self-calibration using its own transmissive device with predefined reference surfaces. The calibration process does not require external intervention or removal of components - the system calibrates itself automatically during normal operation by comparing radiation beam reflections from the transmissive device surfaces, thereby eliminating downtime and maintaining operational continuity.

Inventive Principle:
Principle #25Self-service

2Reliability

If calibration is performed frequently to maintain accuracy under environmental changes, then measurement reliability improves, but productivity decreases due to repeated calibration interruptions

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoidsystem productivity
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent enables continuous calibration and measurement operations without interruption. The transmissive device remains in place throughout the system, allowing calibration to be performed continuously or at any desired interval without removing components or stopping the system. This maintains measurement reliability through frequent calibration while preserving productivity by eliminating calibration-induced interruptions.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The transmissive device with predefined reference surfaces is pre-installed in the system during setup, eliminating the need for repeated installation and removal of calibration standards. This preliminary placement enables rapid, interruption-free calibration operations that maintain reliability without sacrificing productivity.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If ex-situ calibration is performed by removing the apparatus from its environment, then calibration accuracy may be achieved, but the environmental difference reduces measurement reliability

Engineering Contradiction:
Improvecalibration accuracyVSAvoidmeasurement reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The transmissive device with predefined reference surfaces serves as an intermediary calibration standard that bridges the calibration process and the actual measurement environment. By performing calibration in-situ using this intermediate reference object, the system maintains both calibration accuracy and environmental consistency, thereby ensuring measurement reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Measurement precision

If manual calibration procedures are used with moving parts, then calibration can be performed, but device complexity increases and ease of operation decreases

Engineering Contradiction:
Improvecalibration capabilityVSAvoidcalibration operation ease
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent replaces manual mechanical calibration operations with an automated optical system. The transmissive device with predefined reference surfaces enables automatic calibration through radiation beam reflections, eliminating the need for manual positioning and handling of calibration standards. This substitution of mechanical operations with optical automation improves ease of operation while maintaining calibration precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach eliminates the need for external calibration standards, reducing downtime and improving measurement accuracy by allowing continuous operation and real-time calibration within the system's environment.

Implementation Method 1

The first surface of the transmissive device is arranged to reflect a first part of a radiation beam

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

the second surface of the transmissive device is arranged to reflect a second part of the radiation beam

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS12007219B2Laser triangulation apparatus and calibration method
Publication Date: 2024.06.11 ASML NETHERLANDS BV
  • US12007219B2 patent drawing
  • US12007219B2 patent drawing
  • US12007219B2 patent drawing

AI summary

The invention provides an apparatus configured for determining a distance of the apparatus to an object according to the principle of triangulation. The apparatus comprises a transmissive device with a predefined distance between a first surface and a second surface of the transmissive device, and a detector that is configured to receive at least a portion of a radiation beam after interaction with the transmissive device and the object. The first surface is arranged to reflect a first part of the radiation beam, and the second surface is arranged to reflect a second part of the radiation beam. The predefined distance is used for determining the distance of the apparatus to the object.