Triangulation System Throughput via Multi-Camera Segmentation

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Solution Overview

Problem

The throughput of triangulation systems is limited by the performance of general-purpose cameras and optical field of view limitations, making it impractical to enhance throughput without compromising optical performance or using expensive custom camera designs.

Innovation Solution

A system utilizing multiple cameras with an illumination module that emits a spatially incoherent light strip, a collection module with an elongated field of view parallel to the light strip, and a mechanical stage for movement, allowing the cameras to operate in interlaced or non-interlaced modes to measure object heights, with each camera capturing different focus conditions and information from various heights.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple cameras are used to increase throughput, then productivity is improved, but device complexity increases

Engineering Contradiction:
ImprovethroughputVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system divides the measurement task into multiple parallel channels by using multiple cameras (first camera and second camera), each capturing different portions of the object or different focus planes. This segmentation allows simultaneous data collection from multiple perspectives, doubling the throughput while maintaining manageable complexity through modular architecture

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The collection module serves multiple functions: it collects light from the object and distributes it to multiple cameras, and it can operate in different modes (interlaced and non-interlaced) to achieve different objectives (throughput enhancement or accuracy improvement). This multi-functionality increases system versatility without proportionally increasing complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If the mechanical stage travels longer distance during exposure, then throughput is improved, but measurement precision deteriorates

Engineering Contradiction:
ImprovethroughputVSAvoidheight measurement accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

By dividing the field of view into multiple sections captured by different cameras (interlaced mode), the system can tolerate larger stage movements during exposure. Each camera captures a portion of the object, and the combined data reconstructs the full height map, allowing the stage to travel four times the distance while maintaining measurement capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system creates multiple optical copies of the object from different cameras and combines them through image processing. This copying approach allows the physical object to move during exposure while the optical copies remain stable enough for accurate height reconstruction, effectively decoupling stage movement from measurement precision

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration doubles the throughput of the triangulation system in interlaced mode and increases accuracy in non-interlaced mode without sacrificing speed, allowing the mechanical stage to travel four times the distance during exposure while maintaining light intensity, effectively addressing the limitations of single-camera systems.

Implementation Method 1

illuminate the object by a light strip that is spatially incoherent, collecting, by a collection module, light that is reflected from the object

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS9759555B2High throughput triangulation system
Publication Date: 2017.09.12 CAMTEK LTD
  • US9759555B2 patent drawing
  • US9759555B2 patent drawing
  • US9759555B2 patent drawing

AI summary

A system for measuring heights of multiple structures of an object, the system may include an illumination module that is configured to illuminate the object by a light strip that is spatially incoherent; multiple cameras; a collection module that is configured to collect light that is reflected from the object and to distribute the light to the multiple cameras; wherein the collection module has an elongated field of view that has a longitudinal axis that is parallel to the light strip; wherein the multiple cameras are configured to generate, during a height measurement process, detection signals indicative of heights of the multiple structures; a mechanical stage for introducing a movement, during the height measurement process, between the object and each one of the illumination module and the collection module; and a processor that is configured to process the detection signals to determine the heights of the multiple structures.