Triaxial Force Sensor Membrane Adhesion

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Solution Overview

Problem

Existing triaxial contact force sensors embedded in elastomeric materials are complex and expensive to manufacture, requiring multiple steps and long durations due to the use of microelectronics technologies and multiple substrates.

Innovation Solution

A triaxial force sensor design that eliminates the need for a rod by using a deformable membrane with adhesion means distributed uniformly over its surface, securing it to the elastomeric material, allowing for triaxial force detection without significant hysteresis, and utilizing piezoresistive or capacitive detection methods.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If a rod is used to transmit forces from elastomeric material to the membrane, then force transmission is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improveforce transmissionVSAvoiddevice complexity
Core Design Contradiction:
ForceVSDevice complexity

Solution Approach 1:

The patent removes the rod component entirely from the force sensor design. Instead of using a rod to transmit forces from the elastomeric material to the membrane, the invention directly couples the membrane to the elastomeric material through adhesion means distributed across the membrane surface, thereby eliminating the intermediate rod structure and reducing device complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges the force transmission function directly into the membrane structure itself. By distributing adhesion means across the entire membrane surface, the membrane both detects deformation and transmits forces simultaneously, eliminating the need for a separate rod component and simplifying the overall device architecture.

Inventive Principle:
Principle #5Merging (Combining)

2Strength

If multiple substrates are used to form the membrane and rod, then structural integrity is improved, but manufacturing time and complexity increase

Engineering Contradiction:
Improvestructural integrityVSAvoidmanufacturing time
Core Design Contradiction:
StrengthVSLoss of time

Solution Approach 1:

The patent combines the membrane and rod functions into a single substrate structure. The membrane is formed from one substrate with adhesion means integrated into it, eliminating the need to manufacture and assemble multiple separate substrates, thereby reducing manufacturing time while maintaining structural integrity through the unified design.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If anisotropic chemical etching is used to form the membrane and rod, then manufacturing precision is improved, but production duration increases

Engineering Contradiction:
Improvemanufacturing precisionVSAvoidproductivity
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent removes the requirement for complex anisotropic chemical etching processes by eliminating the rod structure. The membrane can be formed using simpler, faster fabrication techniques without needing the multi-step anisotropic etching required to create precise rod geometries, thereby maintaining manufacturing precision for the membrane while significantly reducing production duration.

Inventive Principle:
Principle #2Taking out (Extraction)

4Force

If adhesion means are distributed uniformly over the membrane surface, then force distribution is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveforce distributionVSAvoiddevice complexity
Core Design Contradiction:
ForceVSDevice complexity

Solution Approach 1:

The patent applies adhesion means locally across the membrane surface in a distributed pattern. This local distribution of adhesion features throughout the membrane area enables uniform force transmission from the elastomeric material to the membrane without requiring complex global structural modifications, thereby achieving improved force distribution while maintaining relatively simple device architecture.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces manufacturing complexity and cost while maintaining equivalent measurement quality, enabling efficient triaxial force detection across various directions without the need for multiple substrates or lengthy production processes.

Implementation Method 1

The deformation of membrane 12 by rod 14 is measured by transduction means 16, such as piezoresistive strain gauges or capacitance variation detectors, arranged on membrane 12.

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 2

The deformation of membrane 12 by rod 14 is measured by transduction means 16, such as piezoresistive strain gauges or capacitance variation detectors, arranged on membrane 12.

Methodology Applied
Scientific EffectCapacitance variation: Capacitance

Data Source

PatentEP2396636B1Contact force sensor
Publication Date: 2013.01.23 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP2396636B1 patent drawingFigure 1~2
  • EP2396636B1 patent drawingFigure 3~4
  • EP2396636B1 patent drawingFigure 5~6

AI summary

The invention relates to a triaxial force sensor (100) comprising at least: a deformable membrane (104); a means (106) for detecting a deformation of the membrane capable of performing triaxial detection of the force to be detected; an adhesion means (112) arranged on at least one of the main surfaces of the deformable membrane, capable of rigidly connecting one of the main surfaces of the deformable membrane to at least one elastomer material (114) to be urged by the force to be detected, and evenly distributed across the entire surface of said one of the main surfaces of the deformable membrane, the deformable membrane being arranged between a cavity (111) and the elastomer material.