Triaxial Magnetic Sensor Groove Layout for Process Control
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Solution Overview
Problem
Traditional triaxial magnetic sensors face difficulties in process control due to the concentrated distribution of slopes, leading to processing errors and reduced product yields.
Innovation Solution
A triaxial magnetic sensor design featuring a substrate with partially concave grooves, where first and second magnetic sensing mechanisms are on the surface and third mechanisms are inside the grooves, arranged to form independent Wheatstone bridges with magnetic reluctance bars, pseudo-magnetic reluctance bars, and set/reset coils, improving process control and yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional discrete X, Y, and Z bridge resistance designs are used with concentrated slope distribution, then the sensor structure is compact, but processing errors increase and process control becomes difficult
Solution Approach 1:
The patent divides the sensing elements into separate groups: X-axis and Y-axis sensing units remain in the plane, while Z-axis sensing units are positioned on slopes. The slopes are segmented into four distinct groups (first, second, third, and fourth slopes) with different orientations, distributing the complex structural elements across multiple organized sections rather than concentrating all slopes in one location.
Solution Approach 2:
The patent transitions from a two-dimensional planar arrangement to a three-dimensional structure by introducing slopes at different angles and positions. The Z-axis sensing units are placed on slopes that extend in the vertical dimension, while X and Y sensing units remain in the horizontal plane, creating a multi-layered spatial arrangement that separates processing-critical elements.
2Productivity
If concentrated slope distribution is used to achieve compact sensor design, then device size is reduced, but product yields decrease
Solution Approach 1:
The slope structures are divided into four separate groups (first, second, third, and fourth slopes) with distinct orientations and positions. This segmentation allows each slope group to be independently optimized and processed, reducing the compounding effect of processing errors that would occur with concentrated slope distribution, thereby improving overall product yields.
Solution Approach 2:
Different regions of the sensor have specialized functions: X-axis sensing units are positioned in specific areas for horizontal sensing, Y-axis units in other areas, and Z-axis units on the slopes. Each local region is optimized for its specific sensing function, with the slope regions specifically designed to provide vertical sensing capability while maintaining overall device compactness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design reduces processing errors, enhances process windows, and improves overall product yields by addressing the challenges of slope concentration in traditional sensors.
Implementation Method 1
the third magnetic sensing mechanism comprises at least one third magnetic reluctance bar... configured to detect a magnetic field in a third direction
Implementation Method 2
set/reset coils are arranged above or/and below each magnetic reluctance bar, which are configured to generate a magnetic field along an axis of easy magnetization
Implementation Method 3
each of the magnetic sensing mechanisms is combined separately to form an independent Wheatstone bridge, with each bridge arm of each Wheatstone bridge composed of at least one magnetic reluctance bar
Data Source
AI summary
Some embodiments relate to a triaxial magnetic sensor and a manufacturing process therefor. The triaxial magnetic sensor includes a substrate forming at least two grooves, a first magnetic sensor mechanism, a second magnetic sensor mechanism and a third magnetic sensor mechanism; the first magnetic sensor mechanism detects the magnetic field in a first direction; the second magnetic sensor mechanism detects the magnetic field in a second direction; the third magnetic sensor mechanism detects the magnetic field in a third direction; the first magnetic sensor mechanism and the second magnetic sensor mechanism are arranged on the surface of the substrate, and the third magnetic sensor mechanism is arranged within the grooves. At least one pair of adjacent grooves are spaced apart by the at least one first magnetic sensor mechanism and/or the at least one second magnetic sensor mechanism.