Trichlorodisilane Synthesis via Alkylaluminum Hydride Reduction

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Solution Overview

Problem

Existing methods for producing trichlorodisilane suffer from insufficient selectivity, inadequate yields, the production of undesirable byproducts, and the use of costly or hazardous starting materials, making them unsuitable for industrial-scale production.

Innovation Solution

A method involving the combination of an alkylaluminum hydride, a halodisilane with at least 4 halogen atoms, and a solvent at a temperature below 80°C, which reduces the halodisilane to form a reaction product mixture comprising trihalodisilane, alkylaluminum halide, and solvent.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If hexachlorodisilane is reduced with diethylaluminum hydride, then trichlorodisilane can be produced, but unacceptable amounts of ethylsilane byproduct are generated

Engineering Contradiction:
Improvetrichlorodisilane productionVSAvoidethylsilane byproduct
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes the harmful ethylsilane byproduct from the reaction system by using ethylaluminum dichloride as a selective reactant that converts the unwanted byproduct into a separable complex, enabling its removal from the product stream

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Ethylaluminum dichloride acts as an intermediary substance that mediates between the unwanted ethylsilane byproduct and the desired trichlorodisilane product, converting the harmful byproduct into a complex that can be selectively removed while preserving the main product

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If known methods are used to produce trichlorodisilane, then production can be achieved, but insufficient selectivity and inadequate yields are obtained

Engineering Contradiction:
Improvetrichlorodisilane yieldVSAvoidselectivity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent changes the chemical parameters of the reaction system by introducing ethylaluminum dichloride as a selective reactant and controlling the molar ratio of reactants, which improves both the selectivity and yield of trichlorodisilane production

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs feedback control by monitoring the reaction progress and adjusting the addition rate of ethylaluminum dichloride to maintain optimal conditions for high selectivity and yield, preventing formation of unwanted byproducts

Inventive Principle:
Principle #23Feedback

3Productivity

If known methods are used, then trichlorodisilane can be produced, but undesirable byproducts are generated that are hard to separate

Engineering Contradiction:
Improvetrichlorodisilane productionVSAvoidbyproduct separation
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent extracts unwanted byproducts from the reaction mixture by forming separable complexes with ethylaluminum dichloride, which can be removed through simple filtration or distillation, greatly simplifying the separation process

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Ethylaluminum dichloride serves as an intermediary that converts difficult-to-separate byproducts into separable complexes, enabling easy separation through standard purification techniques while maintaining high product yield

Inventive Principle:
Principle #24Intermediary (Mediator)

4Productivity

If conventional methods are used, then production can be achieved, but costly or hazardous starting materials are required

Engineering Contradiction:
Improvetrichlorodisilane productionVSAvoidstarting material cost and safety
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent uses ethylaluminum dichloride as a catalytic or stoichiometric additive that is inexpensive and can be easily disposed of or recovered, replacing the need for expensive or hazardous starting materials in the reduction process

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent changes the reactant parameters by using alternative, safer, and more cost-effective starting materials combined with ethylaluminum dichloride, which achieves the same production goal with improved safety and economic characteristics

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method produces trichlorodisilane cost-effectively with good selectivity and yield, minimal undesirable byproducts, and efficiently separates the product from byproducts, making it suitable for industrial-scale production.

Implementation Method 1

combining a reductive effective amount of an alkylaluminum hydride, a halodisilane comprising at least 4 halogen atoms, and a solvent at a temperature below 80°C, which reduces the halodisilane to form a reaction product mixture comprising trihalodisilane, alkylaluminum halide, and solvent

Methodology Applied
Scientific EffectReduction: Reduction

Data Source

PatentUS12264074B2Synthesis of 1,1,1-trichlorodisilane
Publication Date: 2025.04.01 NATA SEMICONDUCTOR MATERIALS CO LTD

AI summary

A method of making a trihalodisilane, the method comprising: combining a reductive effective amount of an alkylaluminum hydride, a halodisilane comprising at least 4 halogen atoms, and a solvent at a temperature <80° C. and reducing the halodisilane to form a reaction product mixture comprising a trihalodisilane and an alkylaluminum halide.