Trihalodisilane Reduction Chemistry for Low By-Product Purification

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for fabricating trihalodisilane often result in the generation of by-products such as dihalodisilane and tetrahalodisilane, which are difficult to separate from the target product, leading to reduced yield and purification challenges.

Innovation Solution

A method involving a mixed reducing agent comprising an aluminum hydride and a tin hydride is used to reduce halodisilane, allowing for the selective generation and separation of 1,1,1-trihalodisilane through controlled temperature and stirring processes, eliminating the need for additional solvents and improving yield.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional reduction methods using single reducing agents are used, then the reduction reaction can proceed, but by-products such as dihalodisilane and tetrahalodisilane are generated that are difficult to separate from the target product

Engineering Contradiction:
Improvepurity of trihalodisilaneVSAvoidby-product formation
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent uses a mixed reducing agent system comprising both lithium aluminum hydride and dibutyltin hydride. This composite reducing agent system enables selective reduction to produce trihalodisilane while minimizing the formation of difficult-to-separate by-products, thereby improving product purity and facilitating easier purification.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent employs specific temperature control parameters during the reduction reaction. By maintaining the reaction temperature within a controlled range and performing cooling to below 15°C during certain stages, the reaction selectivity is improved, reducing by-product formation and enhancing the ease of separation between target product and by-products.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If high-temperature coupling reactions are used to fabricate trihalodisilane, then the reaction can proceed efficiently, but the separation of by-products becomes more difficult and yield is reduced

Engineering Contradiction:
Improveyield of trihalodisilaneVSAvoidpurification process complexity
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent utilizes temperature as a critical parameter to control the reduction reaction. By conducting the reaction at controlled temperatures and implementing cooling steps to below 15°C, the reaction produces trihalodisilane with high yield while simultaneously ensuring that by-products are formed in minimal amounts and are easily separable, thus simplifying the purification process.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The mixed reducing agent system of lithium aluminum hydride and dibutyltin hydride works synergistically to achieve high-yield production of trihalodisilane. This composite approach ensures that the reduction proceeds efficiently to produce the desired product while minimizing by-product formation, thereby improving both productivity and ease of manufacture through simplified purification.

Inventive Principle:
Principle #40Composite materials

3Ease of operation

If additional solvents are used in the reduction process, then the reaction can be facilitated, but the process complexity and cost increase

Engineering Contradiction:
Improvereaction processabilityVSAvoidprocess steps
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent employs the mixed reducing agent system that inherently facilitates the reduction reaction without requiring additional solvents. The reducing agents themselves provide the necessary reaction medium and functionality, eliminating the need for separate solvent systems and reducing overall process complexity while maintaining ease of operation.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces by-product formation, enhances the yield of high-purity 1,1,1-trihalodisilane, and simplifies the purification process, resulting in improved productivity and economic efficiency.

Implementation Method 1

reducing the halodisilane, using a mixed reducing agent including a first reducing agent represented by following Chemical Formula 1-1 and a second reducing agent represented by following Chemical Formula 2-1

Methodology Applied
Scientific EffectChemical reduction: Reduction

Implementation Method 2

cooling the halodisilane to a first temperature that is higher than a freezing point of the halodisilane and lower than 15° C.

Methodology Applied
Scientific EffectCooling: Cooling

Implementation Method 3

mixing the cooled halodisilane with a mixed reducing agent including an aluminum reducing agent and a tin reducing agent to generate a mixture; stirring the mixture at a second temperature that is higher than the first temperature

Methodology Applied
Scientific EffectMixing: Stirring

Data Source

PatentUS20230264963A1Method for fabricating trihalodisilane and method for fabricating semiconductor device using the same
Publication Date: 2023.08.24 SAMSUNG ELECTRONICS CO LTD
  • US20230264963A1 patent drawing
  • US20230264963A1 patent drawing
  • US20230264963A1 patent drawing

AI summary

A method for fabricating trihalodisilane, the method includes providing a halodisilane including at least four halogen atoms; reducing the halodisilane, using a mixed reducing agent including a first reducing agent represented by following Chemical Formula 1-1, in which RA is an alkyl group, and m and n are each independently 1 or 2, and m+n=3, and a second reducing agent represented by following Chemical Formula 2-1, in which RS is an alkyl group or an aryl group, p and q are each independently 1, 2, or 3, and p+q=4; and obtaining a product including a 1,1,1-trihalodisilane,(RA)m—Al—Hn  [Chemical Formula 1-1](RS)p—Sn—Hq.  [Chemical Formula 2-1]