Trimmable Semiconductor Capacitor for Post-Installation Capacitance Tuning
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Solution Overview
Problem
Existing semiconductor-based capacitors lack the ability to provide precision tunable capacitance, which is necessary for dynamic capacitor arrays in applications requiring mechanical and environmental stability.
Innovation Solution
A capacitor assembly with a substrate, primary and secondary oxide layers, and conductive layers connected by a trimmable conduction line, allowing for fine tuning of capacitance values between a minimum and maximum value in increments of 0.05 pF.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a semiconductor-based capacitor is designed for reliability and stability, then temperature stability and breakdown voltage are improved, but the ability to precisely tune capacitance values is worsened
Solution Approach 1:
The capacitor structure is segmented into multiple oxide layers (first oxide layer, second oxide layer) with different dielectric properties. This segmentation allows independent optimization of each layer's thickness and material composition to achieve both high reliability and precise capacitance tuning. The conduction line is also segmented into multiple sections that can be selectively connected or disconnected to adjust total capacitance in precise increments.
Solution Approach 2:
The capacitor design incorporates dynamic adjustability through the conduction line configuration, which can be selectively connected or disconnected to change capacitance values. This dynamic element allows the capacitor to adapt its capacitance precisely while maintaining the stable semiconductor-based oxide dielectric structure that provides temperature stability and reliability.
2Strength
If a semiconductor-based capacitor is designed for high breakdown voltage, then reliability under stress is improved, but the capability for fine capacitance adjustment is worsened
Solution Approach 1:
The capacitor employs a composite dielectric structure with multiple oxide layers having different thicknesses and material compositions. This composite approach enables the overall structure to withstand high breakdown voltages while the selective connection of conduction line sections provides fine capacitance adjustment capability. Each oxide layer contributes to the overall breakdown strength while the modular conduction configuration enables precision tuning.
3Ease of manufacture
If a capacitor assembly is designed with fixed capacitance for manufacturing simplicity, then ease of manufacture is improved, but the ability to tune capacitance post-installation is worsened
Solution Approach 1:
The capacitor is manufactured with all structural elements (multiple oxide layers, conductive layers, and conduction line sections) already in place, but with the conduction line sections initially connected to provide a default capacitance value. This preliminary configuration simplifies manufacturing, while the design allows for post-installation trimming or disconnection of specific conduction line sections to achieve precise capacitance tuning without requiring complex manufacturing processes.
4Device complexity
If a capacitor uses a single oxide layer for structural simplicity, then device complexity is reduced, but the precision and range of capacitance values are worsened
Solution Approach 1:
Rather than using a single complex oxide layer, the invention segments the dielectric into multiple simpler oxide layers with different thicknesses and materials. This segmentation provides precise control over capacitance characteristics while keeping each individual layer structurally simple and manufacturable. The modular nature of segmented layers facilitates both precision tuning and straightforward fabrication.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise tuning of capacitance values post-installation, enhancing tolerance and variance, suitable for applications needing precision tunable capacitance.
Implementation Method 1
a first capacitor value of the first capacitor and a second capacitor value of the second capacitor in parallel with the first capacitor, wherein the first conduction line connects between the first conductive layer and the second conductive layer
Implementation Method 2
a conduction line formed over the substrate. The conduction line is connected between the primary conductive layer and the secondary conductive layer
Data Source
AI summary
A capacitor assembly includes a primary capacitor and a secondary capacitor formed on a substrate. The primary capacitor and the secondary capacitor can be connected by a conduction line. The conduction line can be formed from a thin metal connection. The conduction line can be severed, i.e., trimmed, to finely tune a capacitance value of the capacitor assembly. The capacitor assembly can allow for tighter tolerance and wider variance of the capacitance value of the capacitor assembly. The capacitor assembly can be trimmed after installing the capacitor assembly in the circuit, thereby enabling fine tuning of the capacitance value of the capacitor assembly for applications requiring precision tunable capacitance.