Triple-Electrode Showerhead Structure for Unified PECVD and PEALD

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Solution Overview

Problem

Existing PECVD and PEALD devices require separate design and manufacturing due to their distinct deposition methods, leading to increased costs and verification processes.

Innovation Solution

A triple-electrode device is developed, comprising an electrode cover, a first shower head unit, a second shower head unit, and an optional third shower head unit for mixing gases, allowing for both PECVD and PEALD processes to be integrated into a single device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If PECVD and PEALD devices are designed and manufactured separately, then each device can be optimized for its specific deposition method, but manufacturing costs increase and verification processes become more complex

Engineering Contradiction:

Improvedeposition method optimizationVSAvoidmanufacturing cost

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent combines PECVD and PEALD devices into a single integrated system with a unified chamber structure, electrode assembly, and shower head configuration. This merging allows both deposition methods to share common components, reducing manufacturing costs and simplifying verification processes while maintaining optimized performance for each specific deposition method through configurable gas supply sections and electrode arrangements

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The integrated device design enables a single system to perform multiple functions - both PECVD and PEALD deposition methods can be executed using the same hardware platform. The system achieves universality through configurable gas supply sections that can handle mixed gases for PECVD or separated precursors for PEALD, along with a unified electrode and shower head structure that supports both process types

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If PECVD and PEALD devices are designed and manufactured separately, then each device can be optimized for its specific deposition method, but verification processes become more extensive

Engineering Contradiction:

Improvedeposition method optimizationVSAvoidverification process time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

By merging PECVD and PEALD verification into a single integrated device, the patent reduces the total verification time required. Instead of separately verifying two independent devices, the unified system allows concurrent or sequential verification of both deposition methods within one platform, significantly reducing the verification process time while maintaining optimized performance for each method

Inventive Principle:

Principle #5Merging (Combining)

3Ease of manufacture

If a single device integrates both PECVD and PEALD processes, then manufacturing costs decrease and verification processes are simplified, but device structure becomes more complex

Engineering Contradiction:

Improvemanufacturing costVSAvoidintegrated structure

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent manages device complexity through segmentation of the integrated system into distinct functional modules - separate gas supply sections for mixed gases and separated precursors, modular electrode assemblies, and segmented shower head structures. This segmentation allows the complex integrated device to be designed, manufactured, and maintained as manageable modules while achieving cost reductions through shared components and unified verification processes

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The triple-electrode device enables the fusion of PECVD and PEALD processes, reducing manufacturing costs and simplifying verification processes while maintaining the effectiveness of both deposition methods.

Implementation Method 1

an electrode cover to which RF power is applied

Methodology Applied

Scientific EffectRF power application: Electromagnetic Induction

Implementation Method 2

the first gas diffused in the first gas supply section is exhausted

Methodology Applied

Scientific EffectGas diffusion: Diffusion

Implementation Method 3

the second gas diffused in the second gas supply section is exhausted

Methodology Applied

Scientific EffectGas diffusion: Diffusion

Implementation Method 4

allowing the first gas and the second gas to be mixed and then exhausted

Methodology Applied

Scientific EffectGas mixing: Diffusion

Data Source

PatentUS20250075324A1Triple-electrode device for fusing and mixing device of mixed gas/separated gas

Publication Date: 2025.03.06 JEHARA CORP

AI summary

A triple-electrode device for a fusing and mixing device of mixed gas/separated gas is proposed. The device includes an electrode cover to which RF power is applied, a first shower head unit provided with the electrode cover at an upper part thereof, provided with a first gas supply section into which a first gas is introduced, and provided with a plurality of nozzle stems protruding from a lower part thereof through which the first gas diffused in the first gas supply section is exhausted, and a second shower head unit coupled to the lower part of the first shower head unit, provided with a second gas supply section into which a second gas is introduced, and formed with through holes into which the nozzle stems are respectively inserted and a plurality of exhaust holes through which the second gas diffused in the second gas supply section is exhausted.