Triple-Membrane MEMS Device for Enhanced Noise Reduction
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Solution Overview
Problem
Existing dual-membrane MEMS silicon microphones face challenges in reducing ASIC noise, necessitating increased capacity to meet evolving MEMS microphone requirements.
Innovation Solution
A triple-membrane MEMS device is introduced, comprising a first membrane, a second membrane with openings, and a third membrane, with a sealed low-pressure chamber and electrodes, along with pillars for mechanical and electrical coupling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a sealed dual-membrane MEMS silicon microphone is used, then noise reduction is improved, but ASIC noise remains and capacity is insufficient
Solution Approach 1:
The patent divides the single membrane into three separate membranes (first membrane, second membrane, and third membrane) arranged in sequence. Each membrane can independently respond to acoustic pressure waves, effectively segmenting the sensing function to increase overall capacity while maintaining noise reduction benefits through the sealed dual-membrane configuration.
Solution Approach 2:
The patent transitions from a single-membrane or dual-membrane configuration to a triple-membrane structure, adding an additional dimension of sensing capability. The membranes are arranged in a sequential manner with low pressure regions between them, creating a multi-layered sensing system that increases capacity without compromising noise reduction performance.
2Object-affected harmful factors
If dual-membrane configuration is used, then noise reduction is achieved, but capacity is insufficient for evolving requirements
Solution Approach 1:
The sensing function is segmented across three membranes instead of two, allowing each membrane to contribute to the overall capacity. The first membrane, second membrane, and third membrane are arranged sequentially with low pressure regions between them, enabling independent acoustic response from each membrane while maintaining the noise reduction advantages of the sealed dual-membrane design.
Solution Approach 2:
The patent merges the functionality of three membranes into a single integrated sensing system. The first membrane, second membrane, and third membrane work together in conjunction with the low pressure regions and electrodes to create a unified sensing apparatus that achieves both noise reduction and increased capacity simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The triple-membrane configuration enhances noise reduction capabilities by increasing capacitance, effectively addressing the limitations of dual-membrane designs and improving the performance of MEMS microphones.
Implementation Method 1
a sealed low pressure chamber between the first membrane and the third membrane
Implementation Method 2
The movement of the membrane relative to the fixed plate varies the distance between the membrane and the fixed plate of the variable capacitor, which in turn varies the capacitance of the variable capacitor
Data Source
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AI summary
A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber.