Triple Pipe Heating Device for Semiconductor Exhaust Gas
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Solution Overview
Problem
In semiconductor and LCD manufacturing, existing devices for heating exhaust gases to prevent solidification often require nitrogen gas, which is costly and difficult to install, and lack effective leakage detection.
Innovation Solution
A triple pipe heating device with a expandable and bendable structure, using a heating member with a heating wire and thermally conductive materials to efficiently heat exhaust gases without nitrogen, and includes temperature sensors for quick leakage and overheating detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If nitrogen gas is used to heat exhaust gas to prevent solidification, then the exhaust gas solidification is prevented, but the device complexity and installation difficulty increase
Solution Approach 1:
The patent extracts the heating function from a complex nitrogen gas generation system and implements it through a simple heating wire embedded in the pipe wall. This eliminates the need for separate nitrogen gas facilities while maintaining the exhaust gas temperature control function, thereby reducing device complexity and installation difficulty.
Solution Approach 2:
The heating wire is directly embedded in the pipe wall structure, allowing the pipe itself to perform the heating function. This self-service approach eliminates the need for external heating facilities and complex installation procedures, while effectively preventing exhaust gas solidification through direct thermal contact.
2Temperature
If conventional heating devices are used, then exhaust gas can be heated, but the installation is difficult and expansion/bending is restricted
Solution Approach 1:
The pipe is constructed with a flexible bellows structure that allows expansion and bending while maintaining thermal contact between the heating wire and the pipe wall. This flexible design enables easy installation in various spatial configurations without compromising the heating function or temperature control of the exhaust gas.
Solution Approach 2:
The bellows structure provides dynamic flexibility to the pipe, allowing it to expand and bend as needed during installation and operation. This dynamic capability enables the pipe to adapt to different installation environments while maintaining effective heating performance through the embedded heating wire.
3Reliability
If heating is applied to exhaust gas pipes, then solidification is prevented, but heat loss increases
Solution Approach 1:
The heating wire is embedded only in the specific regions of the pipe where exhaust gas flow occurs, providing localized heating exactly where needed. This prevents unnecessary heat loss to surrounding areas while effectively maintaining exhaust gas temperature to prevent solidification in the critical flow zones.
Solution Approach 2:
The pipe structure itself serves as the heating element through the embedded heating wire, creating direct thermal contact between the heat source and the exhaust gas. This eliminates intermediate heat transfer steps and reduces heat loss, while effectively preventing solidification through efficient direct heating.
4Ease of operation
If connection parts are used to assemble pipes, then installation is simplified, but exhaust gas leakage risk increases
Solution Approach 1:
The pipe segments are merged into a continuous bellows structure with integrated sealing, eliminating separate connection parts that could leak. This unified structure maintains installation simplicity while preventing exhaust gas leakage through the continuous sealed design of the bellows segments.
Solution Approach 2:
The bellows structure provides continuous flexible sealing between pipe segments, eliminating rigid connection parts that are prone to leakage. The flexible bellows design maintains ease of installation while ensuring reliable exhaust gas containment through its continuous sealed construction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively heats exhaust gases with minimal heat input, preventing solidification and enabling easy installation, while quickly detecting leaks and overheating issues.
Implementation Method 1
a heating member (140) provided in close contact with an outer circumferential surface of the inner bellows pipe (120) so as to heat the connection pipe (110) through the inner bellows pipe (120)
Implementation Method 2
a lower layer portion (142) that is formed by molding and contains the heating wire (141) therein, with a lower surface of the lower layer portion (142) being in contact with the inner bellows pipe (120)
Data Source
AI summary
The present invention relates to a triple pipe heating device for heating an exhaust gas in a semiconductor and LCD manufacturing process, which has a triple pipe structure capable of effectively heating an exhaust gas with only a small amount of heat without using nitrogen gas, is expandable and bendable so as to be easily installed, and is capable of quickly detecting exhaust gas leakage and overheating.