Triple-Tube Nozzle for Substrate Analysis Leakage Prevention
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Solution Overview
Problem
Existing substrate analysis nozzles face challenges in efficiently scanning large substrates quickly without leaking analysis solution, particularly on highly hydrophilic substrates, which affects analysis accuracy due to poor collection ratios.
Innovation Solution
A triple-tube structure nozzle with specific exhausting mechanisms and adjustable dimensions to maintain a reduced pressure atmosphere and prevent solution leakage during scanning, allowing for high collection ratios by widening the gap for efficient suction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the nozzle orifice diameter is increased to increase the contact area between analysis solution and substrate surface, then the scanning speed is improved, but the analysis solution is prone to leak through the nozzle tip
Solution Approach 1:
The nozzle is divided into multiple functional sections: an inner nozzle body with the orifice for solution discharge, and an outer tube that surrounds the nozzle body. This segmentation allows the inner nozzle to maintain a small orifice for precise solution control while the outer tube provides additional containment to prevent leakage during scanning operations.
Solution Approach 2:
The inner nozzle body is nested within the outer tube, creating a concentric structure. The outer tube acts as a containment chamber that prevents analysis solution from leaking outward during scanning, while the inner nozzle maintains its small orifice for controlled solution discharge. This nested configuration resolves the contradiction by allowing the inner nozzle to optimize for precision while the outer tube optimizes for leakage prevention.
2Loss of time
If the nozzle orifice diameter is increased to reduce scanning time, then the analysis efficiency is improved, but the analysis solution remains on the substrate after scanning
Solution Approach 1:
The nozzle system segments the solution discharge and collection functions into separate components. The inner nozzle body with its small orifice controls solution discharge to minimize excess, while the outer tube collects any solution that remains on the substrate after scanning, preventing loss of the analysis solution and enabling efficient reuse.
Solution Approach 2:
The outer tube is designed to recover and collect analysis solution that remains on the substrate after scanning, rather than allowing it to be discarded. This recovery mechanism prevents loss of valuable analysis solution while maintaining fast scanning speeds, as the solution can be reused for subsequent analyses.
3Reliability
If a small nozzle orifice is used to prevent solution leakage, then the solution containment is improved, but the scanning time increases for large substrates
Solution Approach 1:
The nested configuration of the inner nozzle body within the outer tube allows the small orifice of the inner nozzle to provide precise solution containment while the outer tube provides additional containment volume. This nested structure enables the system to maintain both small orifice precision and overall solution containment, resolving the contradiction between leakage prevention and scanning speed.
Solution Approach 2:
The solution containment is extended from a single-dimensional (orifice) control to a multi-dimensional containment system. The inner nozzle provides primary containment through the orifice, while the outer tube provides secondary containment in a radial dimension, creating a three-dimensional containment volume that prevents leakage while allowing fast scanning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The triple-tube nozzle effectively prevents analysis solution leakage on highly hydrophilic substrates and achieves a high collection ratio, enhancing analysis accuracy and efficiency.
Implementation Method 1
first exhausting means including a first exhaust path defined between the pipe and the first outer tube; and second exhausting means including a second exhaust path defined between the first outer tube and the second outer tube, wherein the first and second exhaust means are configured to turn the first and the second exhaust paths into a reduced pressure atmosphere
Implementation Method 2
In the case of a hydrophobic substrate, because of surface tension, analysis solution more easily maintains a state of droplets on the surface of the hydrophobic substrate
Data Source
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AI summary
The present invention provides a substrate analysis nozzle that reliably prevents a leakage (release) of analysis solution from the nozzle even in the case of a highly hydrophilic substrate and that collects the analysis solution with a high collection ratio after scanning. The present invention is directed to a substrate analysis nozzle configured to discharge an analysis solution from a tip of the substrate analysis nozzle onto a substrate, configured to scan a surface of the substrate using the discharged analysis solution, and configured to suck the analysis solution. The substrate analysis nozzle has a triple-tube structure made up of: a pipe through which the analysis solution is discharged and sucked; a first outer tube surrounding the pipe and surrounding the analysis solution used for scanning; and a second outer tube surrounding the first outer tube. The substrate analysis nozzle includes: first exhausting means including an exhaust path defined between the pipe and the first outer tube; and second exhausting means including an exhaust path defined between the first outer tube and the second outer tube.