Trisilane Production via Disilane Pyrolysis and Catalytic Dehydrogenation

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Solution Overview

Problem

Current methods for producing trisilane suffer from low yield and production rates, instability at high silane concentrations, and the formation of impurities like siloxanes, making them unsuitable for large-scale production.

Innovation Solution

A method involving the pyrolysis of disilane in a single reactor, where a gas mixture of disilane and an inert gas is introduced at ambient temperature and maintained at a temperature range of 300° C to 500° C, followed by condensation and separation to produce a high-purity trisilane product with a yield of 20% to 40%.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If electric discharge reactors are used to produce higher silanes from lower silanes, then trisilane can be created from disilane, but the plasma becomes unstable at high silane concentrations making the method difficult to implement in large scale production

Engineering Contradiction:
Improveplasma stabilityVSAvoidlarge scale production capability
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent replaces the electric discharge (plasma) system with a catalytic system using metal halide catalysts. This substitution eliminates the plasma instability issue at high silane concentrations while enabling large-scale production. The catalytic dehydrogenation reaction proceeds steadily without the instability problems inherent in plasma processes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the reaction parameters by introducing specific metal halide catalysts (FeCl3, AlCl3, GaCl3, InCl3) and controlling reaction conditions such as temperature (200-500°C) and silane concentration (10-50%). These parameter changes enable stable large-scale production that overcomes the limitations of plasma methods.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If pyrolysis reactions are conducted in two reactors connected in series to produce higher silanes from lower silanes, then trisilane can be obtained, but the reaction yield and production rate are extremely low making the method difficult to implement in large scale production

Engineering Contradiction:
Improveproduct yieldVSAvoidproduction rate
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent segments the reaction process into two separate catalytic dehydrogenation steps, each occurring in its own reactor with optimized conditions. The first reactor converts monosilane to disilane, and the second converts disilane to trisilane. This segmentation allows each step to operate at high efficiency, achieving both high yield and high production rate that cannot be achieved in a single reactor or through pyrolysis.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses metal halide catalysts as intermediaries to facilitate the dehydrogenation reactions. These catalysts (FeCl3, AlCl3, GaCl3, InCl3) enable the reactions to proceed with high yield and production rate by lowering activation energy and providing alternative reaction pathways, overcoming the limitations of uncatalyzed pyrolysis.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If dehydrogenation of monosilane is conducted in the presence of a specific catalyst to create higher silanes, then the reaction can proceed, but impurities like siloxanes are formed which are very difficult to remove and the yield and production rate are very low

Engineering Contradiction:
Improvereaction feasibilityVSAvoidproduct purity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent optimizes reaction parameters including temperature (200-500°C), silane concentration (10-50%), and catalyst selection to minimize siloxane formation. By carefully controlling these parameters, the process achieves high product purity while maintaining reaction feasibility and high production rate.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent incorporates separation and purification steps to remove impurities including siloxanes from the reaction mixture. The process discards unwanted byproducts and recovers pure trisilane product, achieving high manufacturing precision while maintaining ease of manufacture through the catalytic process.

Inventive Principle:
Principle #34Discarding and recovering

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method achieves a high-purity trisilane product with improved yield and reduced impurities, suitable for large-scale production by optimizing reactor temperature and residence time, and subsequent purification through distillation.

Implementation Method 1

A second gas mixture, which comprises trisilane, is produced through a pyrolysis reaction of the first gas mixture in the reactor, where the reactor is maintained at a first temperature

Methodology Applied
Scientific EffectPyrolysis: Pyrolysis

Implementation Method 2

The second gas mixture then is introduced into a condensing zone, where the condensing zone is made of at least a first and a second condenser. The second gas mixture is condensed in the condensing zone

Methodology Applied
Scientific EffectCondensation: Condensation

Data Source

PatentUS7906094B2Method for producing a high purity trisilane product from the pyrolysis of disilane
Publication Date: 2011.03.15 LAIR LIQUIDE SA POUR LETUDE & LEXPLOITATION DES PROCEDES GEORGES CLAUDE
  • US7906094B2 patent drawing

AI summary

Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.