TRO Membrane Support Post Surface Area
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Solution Overview
Problem
The fabrication of extreme ultraviolet transition radiation oscillator (TRO) devices faces challenges with membrane damage and shape changes due to the removal of intervening material, leading to aberrational output radiation and performance issues.
Innovation Solution
The solution involves improving the structural integrity of TRE membranes by increasing the surface area of the interface between the membrane and its support post, and using a specific processing sequence to remove intervening material between membranes, including the use of etch stop layers, hardmask layers, and a combination of wet and dry etching processes to prevent stiction and ensure proper membrane support.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If intervening material is removed between membrane layers to enable proper TRO device operation at EUV frequencies, then device operation is improved, but membrane damage and shape changes occur
Solution Approach 1:
The patent applies preliminary action by forming support posts between membrane layers before removing the intervening material. This pre-established support structure prevents membrane damage and shape changes that would otherwise occur during the material removal process, enabling safe creation of vacuum regions for EUV operation.
Solution Approach 2:
The patent introduces support posts as intermediary structures between membrane layers. These posts serve as mediators that maintain membrane spacing and structural integrity during and after the removal of intervening material, allowing the device to operate in vacuum conditions without damaging the membranes.
2Reliability
If membrane surface area contact with support post is increased to improve structural integrity, then membrane stability is improved, but fabrication complexity increases
Solution Approach 1:
The patent resolves the contradiction by transitioning from a point-contact support model to a surface-area contact model. The support posts are designed to contact membranes over extended surface areas rather than at single points, fundamentally changing the dimensional nature of the support interface and thereby improving stability without excessive fabrication complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the structural integrity of the membranes, reduces membrane damage, and maintains consistent output radiation, improving the performance and reliability of TRO devices by minimizing aberrations in peak intensity and wavelength.
Implementation Method 1
combining wet and dry etching processes
Implementation Method 2
combining wet and dry etching processes
Implementation Method 3
extreme ultraviolet transition radiation oscillator (TRO) structures
Data Source
AI summary
In one embodiment of the present invention, intervening material layers (208) are recessed (304) relative to membrane layers (208) thereby providing increased surface area contact between the membranes (208) and support posts (408). Increased surface area contact assists in reducing membrane shape changes (122) and defects (124, 126) that can result from thermal and physical stress.In an alternative embodiment, problems related to stiction during release of a stack of membranes (208) is reduced by using different processes to completely remove portions of intervening material layers (206) between membrane layers (208). The first process removes the bulk of the intervening material layer (206). The second process removes the remaining portions of the intervening material layer (602).