Truncated Arm Link Configuration for Deep-Set Substrate Access
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current substrate transport apparatuses are limited by the size of the gate valve, restricting the reach into processing modules, as only the end effector can extend through the valve, while the arm remains within the transport chamber.
Innovation Solution
The design incorporates a truncated arm link that extends through the gate valve, allowing the wrist axis and part of the forearm and end effector to access deep-set substrate holding stations, providing a longer reach by adjusting the arm link lengths and configuration to fit through the valve port.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the transport arm is extended through the gate valve to increase reach, then the ability to access deep-set substrate holding stations is improved, but the gate valve size and structural complexity increase
Solution Approach 1:
The transport arm is divided into multiple segments including a base portion, an intermediate portion, and an end effector portion. The intermediate portion can be selectively positioned to extend through the gate valve when needed, while the majority of the arm remains within the transport chamber. This segmentation allows the system to achieve extended reach without permanently increasing gate valve complexity.
Solution Approach 2:
The transport arm configuration is made dynamic through the ability to selectively extend and retract the intermediate portion. A drive mechanism enables the intermediate portion to move between retracted and extended positions, allowing the system to adapt its reach based on operational requirements while maintaining a compact baseline configuration that does not permanently increase gate valve structural complexity.
2Device complexity
If the transport arm remains within the transport chamber to maintain gate valve simplicity, then the gate valve structure is kept simple, but the reach into processing modules is limited
Solution Approach 1:
The intermediate portion of the transport arm is pre-configured in a retracted position within the transport chamber, ready for rapid deployment. When access to deep-set substrate holding stations is required, the drive mechanism quickly extends the intermediate portion through the gate valve, providing extended reach on-demand without requiring permanent structural modifications to the gate valve.
Data Source
AI summary
A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.