TSV Bridge Assembly with Top-Die-First Routing Density Gain

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Solution Overview

Problem

Current advanced packaging technologies face challenges in achieving high interconnect density, reduced routing distances, and improved signal and power integrity for high-performance computing applications, while also being cost-effective and less complex to manufacture.

Innovation Solution

The proposed microelectronic assembly includes multiple layers of dies coupled by redistribution layers (RDLs) with conductive pathways, where the dies have varying thicknesses and surface areas, and are electrically coupled through interconnects and RDLs, allowing for increased interconnect density and reduced routing distances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional packaging technologies are used, then manufacturing simplicity and cost-effectiveness are maintained, but interconnect density and routing distance are insufficient for high-performance computing

Engineering Contradiction:
Improvesignal and power integrityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent inverts the conventional bottom-up assembly approach by using a top-die-first method where the thickest die is placed first on the carrier, followed by thinner dies. This inversion simplifies the manufacturing process by eliminating the need for complex thickness compensation mechanisms while achieving high interconnect density and improved signal integrity through the through-silicon via bridge structure

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent transitions from planar interconnect architecture to three-dimensional through-silicon via bridges, adding the vertical dimension to interconnections. This dimensional change enables shorter routing distances and improved signal integrity while maintaining manufacturing feasibility through the top-die-first assembly approach

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If interconnect density is increased and routing distances are reduced, then signal and power integrity improve, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvesignal integrityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

By inverting the assembly sequence to place the thickest die first, the patent achieves high interconnect density with standard manufacturing processes, avoiding the need for costly custom equipment or complex process steps that would otherwise be required to achieve the same results

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The through-silicon via bridges are formed as integral parts of the die structure during semiconductor fabrication, eliminating the need for separate, costly post-assembly interconnect formation processes. The structure serves multiple functions simultaneously: providing mechanical support, electrical interconnection, and thermal management pathways

Inventive Principle:
Principle #25Self-service

3Productivity

If through-silicon via bridges are used, then interconnect density increases and routing distances reduce, but manufacturing process complexity increases

Engineering Contradiction:
Improveassembly efficiencyVSAvoidprocess complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The inverted top-die-first assembly approach simplifies the overall manufacturing process by allowing standard pick-and-place equipment to be used without modification, while the through-silicon via bridges provide the high-density interconnection capability that would otherwise require complex manufacturing steps

Inventive Principle:
Principle #13The other way round (Inversion)

Data Source

PatentEP4546420A1High performance microelectronic assemblies including through-silicon via bridges with top die first approach
Publication Date: 2025.04.30 INTEL CORP
  • EP4546420A1 patent drawingFigure 1
  • EP4546420A1 patent drawingFigure 2A~2B
  • EP4546420A1 patent drawingFigure 2C

AI summary

Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first layer having first dies in a first insulating material; a second layer on the first layer, the second layer including second dies having a first thickness and third dies having a second thickness different than the first thickness, the second dies and the third dies in a second insulating material, wherein the second dies and third dies have a first surface and an opposing second surface, and wherein the first surfaces of the second and third dies have a combined surface area between 3,000 square millimeters (mm2) and 9,000 mm2; and a redistribution layer (RDL) between the first layer and the second layer, the RDL including conductive pathways, wherein the first dies are electrically coupled to the second dies and the third dies by the conductive pathways and by interconnects.