TSV Detection Circuit for 3D Chip Reliability

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Solution Overview

Problem

The high cost of redundant through-silicon via (TSV) and detection circuits makes them unsuitable for mass production of 3D chips, as they are prone to failures during manufacturing and bonding, affecting chip performance.

Innovation Solution

A through-silicon via detecting circuit with a first and second detecting module, each comprising input units, switching units, and comparison units, that transmit input signals and control signals to detect faulty TSVs and determine their location, allowing for the use of redundant TSVs to shield defects, with a simple structure suitable for mass production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If redundant TSVs and detection circuits are used to detect and shield failed TSVs, then the reliability of 3D chips is improved, but the manufacturing cost and device complexity increase significantly

Engineering Contradiction:
ImproveTSV failure detection capabilityVSAvoiddetection circuit structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the detection circuit functionality with the existing TSV structure by integrating detection modules directly into the TSV pathways. The detection modules share physical space and signal routes with the TSVs they monitor, eliminating the need for completely separate detection circuits. This merging approach maintains reliability while reducing overall device complexity and manufacturing cost.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The detection modules are designed to perform multiple functions: they can detect TSV failures, identify the location of failures, and work with multiplexers to switch between healthy and failed TSV pathways. This multi-functionality reduces the need for additional dedicated components, thereby lowering device complexity while maintaining comprehensive detection capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If redundant TSVs and detection circuits are used to detect and shield failed TSVs, then the reliability of 3D chips is improved, but the manufacturing cost increases

Engineering Contradiction:
ImproveTSV failure detection capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The detection system is segmented into modular detection modules that can be independently manufactured and then integrated. Each detection module is a discrete functional unit that can be produced using standard semiconductor fabrication processes, reducing overall manufacturing cost compared to creating entirely custom detection circuits.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses standard multiplexer components and detection module designs that can be replicated across multiple TSV pathways. By copying proven, standardized components rather than designing unique solutions for each TSV, the manufacturing cost is reduced while maintaining consistent detection capability across all TSVs.

Inventive Principle:
Principle #26Copying

3Reliability

If conventional detection methods are used, then TSV failures can be detected, but the detection circuit is too complex and costly for mass production

Engineering Contradiction:
ImproveTSV failure detectionVSAvoidmass production suitability
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The detection modules operate by changing the state parameters of TSVs temporarily during detection phases. By altering operational parameters (such as activating detection modes only during specific time windows) rather than maintaining continuous complex monitoring, the system achieves reliable detection while simplifying the circuit design for mass production.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The detection system uses periodic detection cycles rather than continuous monitoring. Detection modules are activated at regular intervals to check TSV status, and multiplexers periodically switch between detection and normal operation modes. This periodic approach reduces the complexity of continuous detection circuits while maintaining effective failure detection capability for mass-produced chips.

Inventive Principle:
Principle #19Periodic action

Data Source

PatentUS11614481B2Through-silicon via detecting circuit, detecting methods and integrated circuit thereof
Publication Date: 2023.03.28 CHANGXIN MEMORY TECH INC
  • US11614481B2 patent drawing
  • US11614481B2 patent drawing
  • US11614481B2 patent drawing

AI summary

A TSV detecting circuit, TSV detecting methods, and an integrated circuit thereof are disclosed by the present disclosure. The TSV detecting circuit includes a first detecting module includes: a first comparison unit; a first input unit, for transmitting an input signal to a first input of the first comparison unit controlled by a first clock signal; a first switching unit for transmitting a signal of a first node to a second input of the first comparison unit controlled by a first detection control signal, the first node coupled to a first terminal of the TSV; and a second detecting module includes: a second input unit for transmitting the input signal to a second node controlled by a second clock signal; a second switching unit for transmitting a signal of the second node to a second terminal of the TSV controlled a second detection control signal.