Miniaturized Particulate Matter Detector Using TSV Filter

Solution Overview

Problem

Current particulate matter detectors are bulky, require frequent cleaning, and are inefficient in selecting and filtering miniaturized particulate matters, limiting their ability to detect air pollution effectively, which is a significant contributor to lung cancer.

Innovation Solution

A miniaturized particulate matter detector is developed using a filter with Through Silicon Vias (TSVs) and a concentration detector, along with a modular design that includes electrodes to charge and direct particulate matter, allowing for efficient detection and measurement of miniaturized particulate matter concentrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional weighing measurement machines are used to detect particulate matter concentration, then measurement accuracy is improved, but device volume becomes huge and requires frequent cleaning

Engineering Contradiction:

Core Design Contradiction:

Measurement precisionVSVolume of stationary object

Solution Approach 1:

The patent replaces the mechanical weighing measurement system with an electrical field-based detection system. The concentration detector uses an electric field to directly measure particulate matter concentration without mechanical weighing, enabling miniaturization while maintaining measurement capability. This substitution of mechanical principles with electrical field principles resolves the contradiction between measurement accuracy and device volume.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the detection parameter from weight measurement to electrical field interaction measurement. By measuring the interaction between charged particulate matters and the electric field in the concentration detector, the system achieves accurate concentration measurement without requiring large-volume mechanical weighing equipment, thus resolving the volume-accuracy contradiction.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If cyclone-type filters are used to fix air speed and select miniaturized particulate matter, then particle selection precision is improved, but device volume becomes huge and requires regularly cleaning

Engineering Contradiction:

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The patent extracts the particle selection function from the complex cyclone-type filter system and integrates it into the TSV filter structure. The TSV filter with specifically designed hole sizes directly selects miniaturized particulate matters without requiring the complex cyclone structure, simplifying the system and reducing cleaning requirements while maintaining size selection precision.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses the TSV filter as a porous structure with precisely controlled hole sizes to select particulate matters by size. The porous TSV filter allows small particulate matters to pass through while blocking larger particles, achieving size selection without the complex moving parts of cyclone filters, thereby reducing cleaning frequency and improving ease of operation.

Inventive Principle:

Principle #31Porous materials

3Productivity

If impactor-type filters with multiple holes and blocking plates are used to collect miniaturized particulate matters, then collection efficiency is improved, but device complexity increases

Engineering Contradiction:

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent merges the filtration and particle collection functions into a single TSV filter structure. The TSV filter integrates the particle selection and concentration detection functions, eliminating the need for separate impactor components with multiple holes and blocking plates. This merging reduces device complexity while maintaining collection efficiency through the electric field-based concentration detector.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the miniaturization of particulate matter detection systems, reducing costs through mass production and enabling portable applications, while effectively detecting and monitoring miniaturized particulate matters, potentially reducing lung cancer risks by identifying pollution sources.

Implementation Method 1

The first electrode has a plurality of discharge tips pointing at the concentration detector, and the plurality of discharge tips are suitable for charging the particulate matter

Methodology Applied

Scientific EffectCharging: Electrostatic Induction

Implementation Method 2

The concentration detector is located between the first electrode and the second electrode that are adapted to generate an electric field at least applied between the filter and the concentration detector, so as to drive the charged particulate matter toward the concentration detector from the filter

Methodology Applied

Scientific EffectElectric field force: Electric Field

Data Source

PatentUS10458893B2Miniaturized particulate matter detector and manufacturing method of a filter

Publication Date: 2019.10.29

AI summary

A miniaturized particulate matter detector that includes a filter and a concentration detector is provided. The filter has a plurality of holes, and the concentration detector is correspondingly disposed under the filter. The concentration detector has a detected area used to detect a concentration of at least one miniaturized particulate matter. A manufacturing method of the filter is also provided.