Compensating TSV Signal Delays via Frequency-Dependent Capacitance Detection

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Solution Overview

Problem

Three-dimensional (3D) memory devices with through-silicon vias (TSVs) experience signal delays due to frequency-dependent parasitic capacitance, leading to inconsistent delays across signals, which can cause transmission errors.

Innovation Solution

A semiconductor device with conductive vias and evaluation circuits that detect signal frequencies and adjust timing to compensate for propagation delays caused by effective capacitance, using delay circuits and latch circuits to differentiate between low and high frequency signals and adjust data transfer timing accordingly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If TSVs are used to interconnect dies in 3D memory devices, then chip size is reduced and bandwidth is increased, but signal delays become inconsistent due to frequency-dependent parasitic capacitance

Engineering Contradiction:
Improvechip sizeVSAvoidsignal transmission consistency
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The evaluation circuit performs preliminary detection of signal frequency characteristics before data transfer, and the timing adjustment circuit pre-adjusts timing based on detected frequency ranges. This preliminary action allows the system to compensate for frequency-dependent capacitance effects before they cause transmission errors, resolving the reliability issue while maintaining the compact 3D structure

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention changes the timing parameters of signal transmission based on detected frequency characteristics. By adjusting timing parameters according to the frequency range detected in the TSV, the system compensates for varying capacitance effects, ensuring consistent signal transmission reliability across different operating conditions

Inventive Principle:
Principle #35Parameter changes

2Productivity

If signal frequency is increased to improve data transfer speed, then bandwidth increases, but effective capacitance of TSV decreases leading to inconsistent delays

Engineering Contradiction:
Improvedata transfer speedVSAvoidsignal delay consistency
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The evaluation circuit provides feedback about signal frequency characteristics to the timing adjustment circuit. This feedback mechanism allows the system to continuously adapt timing adjustments based on actual operating conditions, maintaining reliable signal transmission across varying frequencies and data transfer speeds

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The timing adjustment circuit dynamically changes timing parameters based on detected frequency ranges. This dynamic adaptation allows the system to optimize for both high-speed data transfer and signal reliability by adjusting timing in real-time according to operating conditions

Inventive Principle:
Principle #15Dynamics

3Reliability

If evaluation circuits and timing adjustment circuits are added to compensate for frequency-dependent delays, then signal transmission reliability improves, but device complexity increases

Engineering Contradiction:
Improvesignal transmission consistencyVSAvoidcircuit complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The evaluation and timing adjustment circuits are implemented locally at specific points in the signal path rather than throughout the entire system. This localized approach provides the necessary reliability improvements while minimizing the overall complexity increase by concentrating functional additions only where needed

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces signal delays and transmission errors by accurately compensating for frequency-dependent capacitance, enabling reliable data transfer across a wide range of clock frequencies and improving timing margins in 3D memory devices.

Implementation Method 1

A TSV in HBM may have a parasitic resistance and a parasitic capacitance, which may cause a delay of a signal between an I/F die and a core die transmitted through the TSV. Particularly, capacitance of the TSV may be frequency dependent and effective capacitance (Ceff) of the TSV may appear to be different, depending on a frequency of the signal.

Methodology Applied
Scientific EffectParasitic capacitance: Parasitic Capacitance

Data Source

PatentUS9934832B2Apparatuses and methods for detecting frequency ranges corresponding to signal delays of conductive VIAS
Publication Date: 2018.04.03 MICRON TECHNOLOGY INC
  • US9934832B2 patent drawing
  • US9934832B2 patent drawing
  • US9934832B2 patent drawing

AI summary

Apparatuses for monitoring a signal on a conductive via are described. An example apparatus includes: a controller, a first conductive via, a second conductive via and an evaluation circuit. The controller provides a clock signal as a first signal. The first conductive via provides a second signal responsive to the first signal. The second conductive via provides a third signal responsive to the second signal. Responsive to the third signal, the evaluation circuit provides an evaluation result signal. The evaluation result signal is indicative of a frequency of the clock signal, based on a delay of the third signal relative to the clock signal. The first conductive via, the second conductive via and the evaluation circuit may be included in an interface die. The evaluation circuit may detect whether a frequency of the first signal is below a first threshold frequency and may further provide the evaluation result signal.