Resonant Clocking Using TSV-Based LC Tanks in 3D Stacked Devices

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Solution Overview

Problem

Conventional resonant clocking in three-dimensional stacked devices requires valuable space on the active metal layer for inductors, reducing available routing space and memory capacity, and often necessitates additional capacitance to achieve the desired clock frequency, leading to increased costs and reduced performance.

Innovation Solution

The use of through silicon vias (TSVs) to form LC tank circuits, which provide both capacitance and inductance, allowing for resonant clocking without occupying active metal layer space and enabling sharing of resonant frequency among multiple die layers, thus optimizing space usage and performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If on-chip spiral inductors are used to create resonant circuit structures, then resonant clocking can be achieved, but available routing space within the active material is reduced

Engineering Contradiction:
Improveresonant clockingVSAvoidrouting space
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent transitions from planar spiral inductors on the active metal layer to three-dimensional inductor structures formed through vertical vias and interlayer connections. This dimensional change allows the inductor to occupy vertical space rather than horizontal routing space, resolving the contradiction between achieving resonant clocking and maintaining routing availability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If additional capacitance is added to bring the resonant frequency to the frequency of interest, then the desired clock frequency can be achieved, but the available space for the memory chip is further reduced

Engineering Contradiction:
Improveclock frequencyVSAvoidmemory chip space
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent combines the capacitor and inductor into a single integrated resonant circuit structure where the via structure serves dual purposes: providing electrical connection and forming part of the resonant tank. This merging eliminates the need for separate capacitor components and reduces the overall space required compared to discrete LC components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The via structure performs multiple functions simultaneously: it provides vertical electrical interconnection between layers, serves as part of the inductor structure for resonant clocking, and replaces the need for separate capacitor components. This multi-functionality resolves the contradiction by achieving the desired clock frequency without additional space-consuming components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If conventional resonant clocking is used in three-dimensional stacked devices, then clocking can be provided, but valuable space on the active metal layer is occupied, reducing available routing space and memory capacity

Engineering Contradiction:
ImproveclockingVSAvoidmemory capacity
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent implements resonant clocking structures in the vertical dimension using through-silicon vias and interlayer connections, freeing up the horizontal active metal layer space for memory cell arrays. This dimensional relocation allows both clocking functionality and maximum memory capacity to coexist without conflict.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively saves space on the active side of the die layers by utilizing TSVs to create LC tank circuits, enhancing memory capacity and reducing design and production costs while maintaining synchronous clock grids across die layers.

Implementation Method 1

a resonant circuit that is tuned to (resonates at) a clock frequency

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

one or more of the through silicon vias includes a capacitive structure or an inductive structure

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 3

one or more of the through silicon vias includes a capacitive structure or an inductive structure

Methodology Applied
Scientific EffectInductance: Inductor

Data Source

PatentUS9287196B2Resonant clocking for three-dimensional stacked devices
Publication Date: 2016.03.15 INTEL CORP
  • US9287196B2 patent drawing
  • US9287196B2 patent drawing
  • US9287196B2 patent drawing

AI summary

Resonant clocking for three-dimensional stacked devices. An embodiment of an apparatus includes a stack including integrated circuit dies; and through silicon vias through at least one of the dies, wherein at least a first through silicon via of the through silicon vias includes a capacitive structure or an inductive structure, the first through silicon via being formed in a first die of the plurality of dies. The apparatus includes a resonant circuit, the first through silicon via used as a first circuit element of the resonant circuit.