Tube Pump Squeezing Member for Stable Liquid Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing processing liquid supplying apparatuses face issues with liquid stagnation and pulsation, leading to delayed wafer processing and contamination, with current pumps either allowing stagnation or being unsuitable for stable liquid supply due to pulsation.
Innovation Solution
A processing liquid supplying apparatus using a resilient tube with a squeezing member and guide member, where the squeezing member moves along the tube to pinch and release it, reducing stagnation and pulsation by forming only one pinched part, ensuring stable liquid supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a reciprocation pump is used to supply processing liquid, then the processing liquid can be supplied to the nozzle, but particles stagnate in the dead space of the pump causing contamination and delaying wafer processing
Solution Approach 1:
The patent extracts and eliminates the dead space problem by designing a pump structure where the suction chamber and discharge chamber are completely cleared of liquid before each reciprocation cycle. The piston design with sealed edges and the valve arrangement ensure that no liquid remains stagnated in the pump chambers, thereby removing the source of particle contamination and enabling continuous wafer processing without contamination delays.
2Object-affected harmful factors
If a tube pump is used to reduce liquid stagnation, then liquid stagnation is reduced, but the pump produces large pulsation making it unsuitable for stable liquid supply
Solution Approach 1:
The patent segments the pump operation into distinct suction and discharge phases with complete chamber clearing between phases. The reciprocating piston divides the pumping action into controlled segments where liquid is completely drawn into the suction chamber, then completely discharged, preventing stagnation. The valve system segments the flow paths to ensure complete evacuation of chambers, eliminating pulsation while maintaining continuous stable supply.
3Quantity of substance
If multiple pinched parts are formed in the tube during liquid feeding, then the tube can be effectively compressed, but pulsation increases and liquid supply stability decreases
Solution Approach 1:
The patent applies local quality by positioning the squeezing member to create a single pinched part at a specific location in the tube during liquid feeding. This localized compression ensures efficient liquid propulsion through the tube while maintaining uniform pressure distribution. The single pinched part design prevents the formation of multiple compression zones that would cause pulsation, thereby maintaining stable liquid supply while achieving effective feeding.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces liquid stagnation and pulsation, enabling stable and consistent supply of processing liquids to wafers, preventing contamination and ensuring efficient wafer processing.
Implementation Method 1
a resilient tube serving as a part of the supply passage
Implementation Method 2
a squeezing member that moves along the axial direction of the tube with the tube being pinched between the squeezing member and the guide member, thereby to feed the processing liquid
Data Source
AI summary
In one embodiment, a feed pump of a tube pump type is used for supplying a processing liquid. The tube pump has a squeezing member that moves from a first axial position of a tube at which the squeezing member starts pinching of the tube, to a second axial position at which the squeezing member leaves the tube after feeding the processing liquid toward an ejecting part such as a nozzle. Only one pinched part pinched between the squeezing member and a guide member is formed between the first axial position and the second axial position of the tube, and the only one pinched part moves along the axial direction of the tube, during feeding of a dose of the processing liquid toward the ejecting part.