Tubular Heater Annular Flow Path Cooling Design

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Solution Overview

Problem

Conventional heat treatment apparatuses have complex flow path structures that limit the degree of freedom in outlet design and temperature adjustment, leading to increased costs and sealing difficulties.

Innovation Solution

A heat treatment apparatus with an annular flow path structure between the heat insulator and outer shell, allowing for adjustable temperature reduction without adjustment valves, featuring a common supply duct and band-shaped annular outer heat insulators to form annular flow paths and outlets that direct cooling fluid obliquely towards the central axis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a common air supply duct with distribution tubes and flexible tubes is used to supply cooling fluid to multiple outlets, then the cooling fluid can be distributed to multiple outlets, but the flow path structure becomes complicated and the number of parts increases

Engineering Contradiction:
Improvecooling fluid distributionVSAvoidflow path structure
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent merges multiple distribution tubes and flexible tubes into a single integrated flow path structure formed directly within the heat insulator. The cooling fluid supply port and multiple outlet ports are all formed as integrated channels in the heat insulator, eliminating the need for separate distribution tubes and flexible connections, thus simplifying the overall structure while maintaining the ability to distribute cooling fluid to multiple outlets

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The heat insulator is given multiple functions: it provides thermal insulation, contains the flow path structure for cooling fluid distribution, and serves as the outlet structure itself. By forming the flow path structure directly in the heat insulator, the component performs both insulation and fluid distribution functions, reducing the total number of parts needed

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If adjustment valves or adjustment dampers are provided for each distribution tube to adjust temperature reduction rates, then temperature control flexibility is improved, but the flow path structure becomes more complex and sealing difficulty increases

Engineering Contradiction:
Improvetemperature adjustment flexibilityVSAvoidflow path structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent creates different flow path characteristics at different locations within the heat insulator by forming outlets with different configurations directly in the heat insulator material. Each outlet can have different sizes, shapes, or positions, providing local optimization of cooling fluid distribution and temperature reduction rates without requiring adjustment valves, thus achieving temperature control flexibility while maintaining structural simplicity

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The heat insulator's flow path structure is designed to automatically distribute cooling fluid to different outlets based on the inherent properties of the flow paths (size, shape, position) formed in the insulator material. The system self-regulates the cooling distribution without requiring external adjustment mechanisms, eliminating the need for complex sealing arrangements for adjustment valves

Inventive Principle:
Principle #25Self-service

3Adaptability or versatility

If flexible tubes are used to connect distribution tubes to outlets, then the outlets can be positioned flexibly, but the positions and numbers of outlets are limited and design freedom is reduced

Engineering Contradiction:
Improveoutlet positioning flexibilityVSAvoidflow path structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines the outlet structure with the heat insulator by forming the outlets directly in the heat insulator material. This integration eliminates the need for separate flexible tubes and allows outlets to be positioned at any location within the heat insulator, providing greater design freedom while simplifying the overall structure by reducing the number of separate components

Inventive Principle:
Principle #5Merging (Combining)

4Quantity of substance

If intake ducts are used to distribute cooling fluid to outlets in conventional heat treatment apparatus, then cooling fluid can be supplied to multiple outlets, but the positions and numbers of outlets are limited reducing design freedom

Engineering Contradiction:
Improvecooling fluid supplyVSAvoidoutlet design freedom
Core Design Contradiction:
Quantity of substanceVSAdaptability or versatility

Solution Approach 1:

The patent merges the intake duct function with the heat insulator structure by forming the flow path channels directly within the heat insulator material. This allows outlets to be positioned at multiple locations and orientations within the heat insulator, providing greater design freedom while maintaining the ability to supply cooling fluid to multiple outlets simultaneously

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the design freedom of outlets, simplifies sealing, reduces costs, and enables faster temperature reduction, improving the throughput of heat treatments.

Implementation Method 1

a cooling fluid flows in the annular flow path

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

The cooling fluid in the annular flow path is blown out of the outlet into the inside of the heat insulator

Methodology Applied
Scientific EffectForced convection: Forced Convection

Data Source

PatentUS8253075B2Heat treatment apparatus, heater, and method for manufacturing the heater
Publication Date: 2012.08.28 TOKYO ELECTRON LTD
  • US8253075B2 patent drawing
  • US8253075B2 patent drawing
  • US8253075B2 patent drawing

AI summary

A heat treatment apparatus with a process chamber, a tubular heater, a heat exhaust system and a cooling section. The heater surrounds an outer circumference of the process chamber. The heat exhaust system exhausts an atmosphere in a space between the heater and the process chamber. The cooling section blows a cooling fluid into the space to cool the atmosphere. The heater includes a tubular heat insulator, a heat generating resistor on an inner circumference of the heat insulator, and an outer shell provided on an outer circumference of the heat insulator. The cooling section includes at least one annular flow path between the heat insulator and the outer shell, and an outlet in the heat insulator. The outlet blows cooling fluid toward a vertical central axis of the heat insulator, or in a direction oblique to the direction toward vertical central axis of the heat insulator.