Tubular Laser Light Path for High-Temperature Gas Analysis
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Solution Overview
Problem
Conventional gas analysis devices in semiconductor manufacturing face issues with measurement accuracy due to the exposure of laser sources and photodetectors to high temperatures, which can cause measurement errors and failures, and the use of optical fibers is hindered by susceptibility to vibrations and bending in compact semiconductor device casings.
Innovation Solution
A gas analysis device with a laser light transmission mechanism using tubular members to separate the laser source and photodetector from the gas cell, incorporating reflection mirrors and coupling mechanisms to stabilize laser light path, minimizing temperature exposure and vibration effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the laser source and photodetector are separated from the gas cell to prevent high temperature exposure, then measurement accuracy is improved, but the system complexity increases due to additional light transmission components
Solution Approach 1:
The patent introduces an optical fiber as an intermediary medium to transmit laser light between the laser source and the gas cell. This allows the laser source and photodetector to be positioned away from the high-temperature gas cell while maintaining optical connectivity, thus preventing temperature exposure of sensitive components without significantly increasing system complexity
Solution Approach 2:
The patent segments the optical transmission path into distinct sections: the laser source, optical fiber, gas cell, and photodetector. This segmentation allows each component to be optimally positioned and protected according to its sensitivity requirements, with the optical fiber serving as a flexible connector that isolates the sensitive electronics from thermal interference
2Volume of moving object
If optical fiber is used to transmit laser light in a compact semiconductor device casing, then space utilization is improved, but transmission stability deteriorates due to vibration and bending
Solution Approach 1:
The patent modifies the physical parameters of the optical fiber, specifically selecting fibers with appropriate mechanical properties and coating characteristics that reduce susceptibility to vibration and bending-induced interference. The optical fiber is chosen with parameters that maintain stable light transmission in the compact, vibration-prone environment of semiconductor manufacturing equipment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures accurate gas analysis by preventing laser components from high temperatures and reducing vibration-induced changes in laser light transmission characteristics, allowing for flexible arrangement and improved design freedom.
Implementation Method 1
an inner space of the one or the plurality of tubular members provides a light path for laser light
Implementation Method 2
because the gas is highly heated, convective updraft produced inside the casing
Data Source
AI summary
In order to provide a more practical gas analysis device than that having conventionally been, while keeping the laser source and the photodetector separated from the gas cell, thereby preventing exposure to a high temperature, the gas analysis device includes: a gas cell; a laser source or a photodetector separated from the gas cell; and a laser light transmission mechanism provided between the gas cell and the laser source or the photodetector. The laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for the laser light.